JPS5553414A - Semiconductor crystal growing device - Google Patents

Semiconductor crystal growing device

Info

Publication number
JPS5553414A
JPS5553414A JP12703378A JP12703378A JPS5553414A JP S5553414 A JPS5553414 A JP S5553414A JP 12703378 A JP12703378 A JP 12703378A JP 12703378 A JP12703378 A JP 12703378A JP S5553414 A JPS5553414 A JP S5553414A
Authority
JP
Japan
Prior art keywords
base plate
gas
gas supply
supplying
semiconductor crystal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12703378A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6253933B2 (enrdf_load_stackoverflow
Inventor
Jun Ishii
Kazuhisa Takahashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP12703378A priority Critical patent/JPS5553414A/ja
Publication of JPS5553414A publication Critical patent/JPS5553414A/ja
Publication of JPS6253933B2 publication Critical patent/JPS6253933B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Semiconductor Lasers (AREA)
JP12703378A 1978-10-16 1978-10-16 Semiconductor crystal growing device Granted JPS5553414A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12703378A JPS5553414A (en) 1978-10-16 1978-10-16 Semiconductor crystal growing device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12703378A JPS5553414A (en) 1978-10-16 1978-10-16 Semiconductor crystal growing device

Publications (2)

Publication Number Publication Date
JPS5553414A true JPS5553414A (en) 1980-04-18
JPS6253933B2 JPS6253933B2 (enrdf_load_stackoverflow) 1987-11-12

Family

ID=14949991

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12703378A Granted JPS5553414A (en) 1978-10-16 1978-10-16 Semiconductor crystal growing device

Country Status (1)

Country Link
JP (1) JPS5553414A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02260531A (ja) * 1989-03-31 1990-10-23 Agency Of Ind Science & Technol シリコン表面の処理方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02260531A (ja) * 1989-03-31 1990-10-23 Agency Of Ind Science & Technol シリコン表面の処理方法

Also Published As

Publication number Publication date
JPS6253933B2 (enrdf_load_stackoverflow) 1987-11-12

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