JPS5549020A - Piezoelectric vibrator - Google Patents
Piezoelectric vibratorInfo
- Publication number
- JPS5549020A JPS5549020A JP12294078A JP12294078A JPS5549020A JP S5549020 A JPS5549020 A JP S5549020A JP 12294078 A JP12294078 A JP 12294078A JP 12294078 A JP12294078 A JP 12294078A JP S5549020 A JPS5549020 A JP S5549020A
- Authority
- JP
- Japan
- Prior art keywords
- oxide film
- zink
- thickness
- insulating film
- piezoelectric vibrator
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/46—Filters
Landscapes
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12294078A JPS5549020A (en) | 1978-10-04 | 1978-10-04 | Piezoelectric vibrator |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12294078A JPS5549020A (en) | 1978-10-04 | 1978-10-04 | Piezoelectric vibrator |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5549020A true JPS5549020A (en) | 1980-04-08 |
Family
ID=14848367
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP12294078A Pending JPS5549020A (en) | 1978-10-04 | 1978-10-04 | Piezoelectric vibrator |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5549020A (ja) |
Cited By (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5923613A (ja) * | 1982-07-29 | 1984-02-07 | Murata Mfg Co Ltd | 圧電共振子 |
US4445066A (en) * | 1982-06-30 | 1984-04-24 | Murata Manufacturing Co., Ltd. | Electrode structure for a zinc oxide thin film transducer |
US5438231A (en) * | 1993-08-23 | 1995-08-01 | Rockwell International Corporation | Thin film micromechanical resonator gyro |
WO2003052350A1 (fr) * | 2001-11-27 | 2003-06-26 | Matsushita Electric Industrial Co., Ltd. | Resonateur de micromachine a film mince, gyroscope de resonateur de micromachine a film mince, systeme de navigation faisant appel a ce gyroscope de resonateur de micromachine a film mince et automobile |
JP2007024810A (ja) * | 2005-07-21 | 2007-02-01 | Matsushita Electric Ind Co Ltd | 角速度センサ素子およびその製造方法 |
JP2007183147A (ja) * | 2006-01-06 | 2007-07-19 | Matsushita Electric Ind Co Ltd | 振動素子およびこの振動素子を用いた角速度センサ |
JP2007240540A (ja) * | 2001-11-27 | 2007-09-20 | Matsushita Electric Ind Co Ltd | 薄膜微小機械式共振子ジャイロ |
JP2008199439A (ja) * | 2007-02-15 | 2008-08-28 | Seiko Epson Corp | 圧電振動子、圧電振動子の製造方法 |
JP2008199438A (ja) * | 2007-02-15 | 2008-08-28 | Seiko Epson Corp | 圧電振動子、圧電振動子の製造方法 |
JP2008199440A (ja) * | 2007-02-15 | 2008-08-28 | Seiko Epson Corp | 圧電振動子 |
JP2011059125A (ja) * | 2010-10-28 | 2011-03-24 | Panasonic Corp | 角速度センサ素子 |
-
1978
- 1978-10-04 JP JP12294078A patent/JPS5549020A/ja active Pending
Cited By (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4445066A (en) * | 1982-06-30 | 1984-04-24 | Murata Manufacturing Co., Ltd. | Electrode structure for a zinc oxide thin film transducer |
JPS5923613A (ja) * | 1982-07-29 | 1984-02-07 | Murata Mfg Co Ltd | 圧電共振子 |
US5438231A (en) * | 1993-08-23 | 1995-08-01 | Rockwell International Corporation | Thin film micromechanical resonator gyro |
WO2003052350A1 (fr) * | 2001-11-27 | 2003-06-26 | Matsushita Electric Industrial Co., Ltd. | Resonateur de micromachine a film mince, gyroscope de resonateur de micromachine a film mince, systeme de navigation faisant appel a ce gyroscope de resonateur de micromachine a film mince et automobile |
US7002284B2 (en) | 2001-11-27 | 2006-02-21 | Matsushita Electric Industrial Co., Ltd. | Thin-film micromechanical resonator, thin-film micromechanical resonator gyro, and navigation system and automobile using the resonator gyro |
JP2007240540A (ja) * | 2001-11-27 | 2007-09-20 | Matsushita Electric Ind Co Ltd | 薄膜微小機械式共振子ジャイロ |
JP2007024810A (ja) * | 2005-07-21 | 2007-02-01 | Matsushita Electric Ind Co Ltd | 角速度センサ素子およびその製造方法 |
JP2007183147A (ja) * | 2006-01-06 | 2007-07-19 | Matsushita Electric Ind Co Ltd | 振動素子およびこの振動素子を用いた角速度センサ |
JP2008199439A (ja) * | 2007-02-15 | 2008-08-28 | Seiko Epson Corp | 圧電振動子、圧電振動子の製造方法 |
JP2008199438A (ja) * | 2007-02-15 | 2008-08-28 | Seiko Epson Corp | 圧電振動子、圧電振動子の製造方法 |
JP2008199440A (ja) * | 2007-02-15 | 2008-08-28 | Seiko Epson Corp | 圧電振動子 |
JP2011059125A (ja) * | 2010-10-28 | 2011-03-24 | Panasonic Corp | 角速度センサ素子 |
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