JPS54112195A - Metal vibrator driving piezoelectric thin film - Google Patents

Metal vibrator driving piezoelectric thin film

Info

Publication number
JPS54112195A
JPS54112195A JP1945278A JP1945278A JPS54112195A JP S54112195 A JPS54112195 A JP S54112195A JP 1945278 A JP1945278 A JP 1945278A JP 1945278 A JP1945278 A JP 1945278A JP S54112195 A JPS54112195 A JP S54112195A
Authority
JP
Japan
Prior art keywords
piezoelectric thin
vibrator
thin film
lower case
thin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1945278A
Other languages
Japanese (ja)
Inventor
Saburo Kusama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Suwa Seikosha KK
Original Assignee
Seiko Epson Corp
Suwa Seikosha KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp, Suwa Seikosha KK filed Critical Seiko Epson Corp
Priority to JP1945278A priority Critical patent/JPS54112195A/en
Publication of JPS54112195A publication Critical patent/JPS54112195A/en
Pending legal-status Critical Current

Links

Landscapes

  • Piezo-Electric Transducers For Audible Bands (AREA)

Abstract

PURPOSE: To make it possible to obtain an extremely-thin and highly-reliable vibrator by fixing and supporting a piezoelectric thin-film driving electrode to a lower case with a support part.
CONSTITUTION: Vibrator reed 9 is formed by etching work or press work, and on the flank of vibrator reed 9, piezoelectric thin-film driving electrode 14 of zinc oxide, etc., is formed at the same time. Then, an electrode is fixed and supported to lower case 8 with a support part, and this lower case is formed integrally of a metal plate or of a support frame made of a metal plate and a plate material bonded to it. Consequently, an extremely-thin and highly-reliable vibrator can be obtained.
COPYRIGHT: (C)1979,JPO&Japio
JP1945278A 1978-02-22 1978-02-22 Metal vibrator driving piezoelectric thin film Pending JPS54112195A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1945278A JPS54112195A (en) 1978-02-22 1978-02-22 Metal vibrator driving piezoelectric thin film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1945278A JPS54112195A (en) 1978-02-22 1978-02-22 Metal vibrator driving piezoelectric thin film

Publications (1)

Publication Number Publication Date
JPS54112195A true JPS54112195A (en) 1979-09-01

Family

ID=11999700

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1945278A Pending JPS54112195A (en) 1978-02-22 1978-02-22 Metal vibrator driving piezoelectric thin film

Country Status (1)

Country Link
JP (1) JPS54112195A (en)

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