JPS54112195A - Metal vibrator driving piezoelectric thin film - Google Patents
Metal vibrator driving piezoelectric thin filmInfo
- Publication number
- JPS54112195A JPS54112195A JP1945278A JP1945278A JPS54112195A JP S54112195 A JPS54112195 A JP S54112195A JP 1945278 A JP1945278 A JP 1945278A JP 1945278 A JP1945278 A JP 1945278A JP S54112195 A JPS54112195 A JP S54112195A
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric thin
- vibrator
- thin film
- lower case
- thin
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Piezo-Electric Transducers For Audible Bands (AREA)
Abstract
PURPOSE: To make it possible to obtain an extremely-thin and highly-reliable vibrator by fixing and supporting a piezoelectric thin-film driving electrode to a lower case with a support part.
CONSTITUTION: Vibrator reed 9 is formed by etching work or press work, and on the flank of vibrator reed 9, piezoelectric thin-film driving electrode 14 of zinc oxide, etc., is formed at the same time. Then, an electrode is fixed and supported to lower case 8 with a support part, and this lower case is formed integrally of a metal plate or of a support frame made of a metal plate and a plate material bonded to it. Consequently, an extremely-thin and highly-reliable vibrator can be obtained.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1945278A JPS54112195A (en) | 1978-02-22 | 1978-02-22 | Metal vibrator driving piezoelectric thin film |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1945278A JPS54112195A (en) | 1978-02-22 | 1978-02-22 | Metal vibrator driving piezoelectric thin film |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS54112195A true JPS54112195A (en) | 1979-09-01 |
Family
ID=11999700
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1945278A Pending JPS54112195A (en) | 1978-02-22 | 1978-02-22 | Metal vibrator driving piezoelectric thin film |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS54112195A (en) |
-
1978
- 1978-02-22 JP JP1945278A patent/JPS54112195A/en active Pending
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