JPS5386190A - Electrode structure of tuning fork type crystal vibrator and its formationmethod - Google Patents

Electrode structure of tuning fork type crystal vibrator and its formationmethod

Info

Publication number
JPS5386190A
JPS5386190A JP16005576A JP16005576A JPS5386190A JP S5386190 A JPS5386190 A JP S5386190A JP 16005576 A JP16005576 A JP 16005576A JP 16005576 A JP16005576 A JP 16005576A JP S5386190 A JPS5386190 A JP S5386190A
Authority
JP
Japan
Prior art keywords
electrode structure
tuning fork
type crystal
fork type
formationmethod
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16005576A
Other languages
Japanese (ja)
Other versions
JPS624888B2 (en
Inventor
Makoto Wakasugi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Citizen Watch Co Ltd
Original Assignee
Citizen Watch Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Citizen Watch Co Ltd filed Critical Citizen Watch Co Ltd
Priority to JP16005576A priority Critical patent/JPS5386190A/en
Priority to US05/864,271 priority patent/US4252839A/en
Priority to GB54107/77A priority patent/GB1594980A/en
Publication of JPS5386190A publication Critical patent/JPS5386190A/en
Publication of JPS624888B2 publication Critical patent/JPS624888B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/21—Crystal tuning forks
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/04—Coating on selected surface areas, e.g. using masks
    • C23C14/042—Coating on selected surface areas, e.g. using masks using masks

Abstract

PURPOSE:To enable the performance at a basic vibration mode to be improved and enable sufficiently high performance to be guaranteed even in a vibrator which is made smaller and thinner by adding an improvement to the electrode structure of a tuning fork type crystal vibrator.
JP16005576A 1976-12-29 1976-12-29 Electrode structure of tuning fork type crystal vibrator and its formationmethod Granted JPS5386190A (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP16005576A JPS5386190A (en) 1976-12-29 1976-12-29 Electrode structure of tuning fork type crystal vibrator and its formationmethod
US05/864,271 US4252839A (en) 1976-12-29 1977-12-27 Tuning fork-type quartz crystal vibrator and method of forming the same
GB54107/77A GB1594980A (en) 1976-12-29 1977-12-29 Tuning fork-type quartz crystal vibrator and method of forming the same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16005576A JPS5386190A (en) 1976-12-29 1976-12-29 Electrode structure of tuning fork type crystal vibrator and its formationmethod

Publications (2)

Publication Number Publication Date
JPS5386190A true JPS5386190A (en) 1978-07-29
JPS624888B2 JPS624888B2 (en) 1987-02-02

Family

ID=15706921

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16005576A Granted JPS5386190A (en) 1976-12-29 1976-12-29 Electrode structure of tuning fork type crystal vibrator and its formationmethod

Country Status (1)

Country Link
JP (1) JPS5386190A (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01318543A (en) * 1988-06-17 1989-12-25 Sony Tektronix Corp Dc-dc conversion type power circuit
JP4407635B2 (en) * 2003-07-22 2010-02-03 株式会社大真空 Tuning fork type vibrating piece, tuning fork type vibrator, and method for manufacturing tuning fork type vibrating piece

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4843287A (en) * 1971-10-01 1973-06-22
JPS50120977A (en) * 1974-03-12 1975-09-22
JPS50128489A (en) * 1974-03-28 1975-10-09
JPS51111095A (en) * 1975-03-26 1976-10-01 Seiko Instr & Electronics Ltd Piezo-electrical vibrator

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4843287A (en) * 1971-10-01 1973-06-22
JPS50120977A (en) * 1974-03-12 1975-09-22
JPS50128489A (en) * 1974-03-28 1975-10-09
JPS51111095A (en) * 1975-03-26 1976-10-01 Seiko Instr & Electronics Ltd Piezo-electrical vibrator

Also Published As

Publication number Publication date
JPS624888B2 (en) 1987-02-02

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