Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Nippon Chemical Industrial Co Ltd
Original Assignee
Nippon Chemical Industrial Co Ltd
Nippon Kogaku KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Chemical Industrial Co Ltd, Nippon Kogaku KKfiledCriticalNippon Chemical Industrial Co Ltd
Priority to JP7700978ApriorityCriticalpatent/JPS554530A/ja
Publication of JPS554530ApublicationCriticalpatent/JPS554530A/ja
Publication of JPH0125001B2publicationCriticalpatent/JPH0125001B2/ja