JPS5544731A - High sensitivity piezo-electric body and its manufacture - Google Patents
High sensitivity piezo-electric body and its manufactureInfo
- Publication number
- JPS5544731A JPS5544731A JP11804978A JP11804978A JPS5544731A JP S5544731 A JPS5544731 A JP S5544731A JP 11804978 A JP11804978 A JP 11804978A JP 11804978 A JP11804978 A JP 11804978A JP S5544731 A JPS5544731 A JP S5544731A
- Authority
- JP
- Japan
- Prior art keywords
- piezo
- electric
- film
- anode
- cathode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004519 manufacturing process Methods 0.000 title 1
- 230000035945 sensitivity Effects 0.000 title 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 abstract 2
- 229910052802 copper Inorganic materials 0.000 abstract 2
- 239000010949 copper Substances 0.000 abstract 2
- 230000008878 coupling Effects 0.000 abstract 2
- 238000010168 coupling process Methods 0.000 abstract 2
- 238000005859 coupling reaction Methods 0.000 abstract 2
- 239000000463 material Substances 0.000 abstract 2
- 239000002120 nanofilm Substances 0.000 abstract 1
- 239000000758 substrate Substances 0.000 abstract 1
Landscapes
- Piezo-Electric Transducers For Audible Bands (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11804978A JPS5544731A (en) | 1978-09-27 | 1978-09-27 | High sensitivity piezo-electric body and its manufacture |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11804978A JPS5544731A (en) | 1978-09-27 | 1978-09-27 | High sensitivity piezo-electric body and its manufacture |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5544731A true JPS5544731A (en) | 1980-03-29 |
JPS5712309B2 JPS5712309B2 (enrdf_load_stackoverflow) | 1982-03-10 |
Family
ID=14726751
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP11804978A Granted JPS5544731A (en) | 1978-09-27 | 1978-09-27 | High sensitivity piezo-electric body and its manufacture |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5544731A (enrdf_load_stackoverflow) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4528502A (en) * | 1982-10-01 | 1985-07-09 | General Electric Company | Current sensor |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58164866U (ja) * | 1982-04-28 | 1983-11-02 | 本田技研工業株式会社 | 自動車の車体振動抑制装置 |
JPS6391913U (enrdf_load_stackoverflow) * | 1986-12-08 | 1988-06-14 |
-
1978
- 1978-09-27 JP JP11804978A patent/JPS5544731A/ja active Granted
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4528502A (en) * | 1982-10-01 | 1985-07-09 | General Electric Company | Current sensor |
Also Published As
Publication number | Publication date |
---|---|
JPS5712309B2 (enrdf_load_stackoverflow) | 1982-03-10 |
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