JPS5536728A - Straightness measuring interferometer - Google Patents
Straightness measuring interferometerInfo
- Publication number
- JPS5536728A JPS5536728A JP10923378A JP10923378A JPS5536728A JP S5536728 A JPS5536728 A JP S5536728A JP 10923378 A JP10923378 A JP 10923378A JP 10923378 A JP10923378 A JP 10923378A JP S5536728 A JPS5536728 A JP S5536728A
- Authority
- JP
- Japan
- Prior art keywords
- mirror
- reflected
- light
- straightness
- plane
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Length Measuring Devices By Optical Means (AREA)
Abstract
PURPOSE: To measure the straightness of an article to be measured and the rectilinearly propagating property when manufacturing a machine by receiving interfering fringe altering upon variation of the straightness of the article by a photoelectric detector to count the degree of the fringe.
CONSTITUTION: Plane mirrors 4, 5 are stood on a table 8 moving rectilinearly in parallel with an ideal rectilinear line 10. The light passed through half mirrors 2, 6 of light from a light source 1 is reflected by the plane mirror 4 disposed vertically and by the half mirror 6 through lenses 9, 11, respectively into a detector 12. The light reflected on the mirror 2 is, on the other hand, reflected on the mirror 3 to pass a half mirror 7 and reflected on the plane mirror 5 vertically disposed with respect to the light, and then reflected on the mirror 7 similarly into a photodetector 12. The straightness is obtained by the optical path difference between both the lights. Since the angle between the light wavelength and the optical path is constant, the straightness can be obtained by the number of the interfering fringes.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10923378A JPS5536728A (en) | 1978-09-06 | 1978-09-06 | Straightness measuring interferometer |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10923378A JPS5536728A (en) | 1978-09-06 | 1978-09-06 | Straightness measuring interferometer |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5536728A true JPS5536728A (en) | 1980-03-14 |
Family
ID=14504983
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10923378A Pending JPS5536728A (en) | 1978-09-06 | 1978-09-06 | Straightness measuring interferometer |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5536728A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008115891A (en) * | 2006-10-31 | 2008-05-22 | Inax Corp | Hot water-water mixing valve |
-
1978
- 1978-09-06 JP JP10923378A patent/JPS5536728A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008115891A (en) * | 2006-10-31 | 2008-05-22 | Inax Corp | Hot water-water mixing valve |
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