JPS5536728A - Straightness measuring interferometer - Google Patents

Straightness measuring interferometer

Info

Publication number
JPS5536728A
JPS5536728A JP10923378A JP10923378A JPS5536728A JP S5536728 A JPS5536728 A JP S5536728A JP 10923378 A JP10923378 A JP 10923378A JP 10923378 A JP10923378 A JP 10923378A JP S5536728 A JPS5536728 A JP S5536728A
Authority
JP
Japan
Prior art keywords
mirror
reflected
light
straightness
plane
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10923378A
Other languages
Japanese (ja)
Inventor
Hisayoshi Sato
Koichi Tozawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SATO TOSHIYOSHI
Original Assignee
SATO TOSHIYOSHI
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SATO TOSHIYOSHI filed Critical SATO TOSHIYOSHI
Priority to JP10923378A priority Critical patent/JPS5536728A/en
Publication of JPS5536728A publication Critical patent/JPS5536728A/en
Pending legal-status Critical Current

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  • Length Measuring Devices By Optical Means (AREA)

Abstract

PURPOSE: To measure the straightness of an article to be measured and the rectilinearly propagating property when manufacturing a machine by receiving interfering fringe altering upon variation of the straightness of the article by a photoelectric detector to count the degree of the fringe.
CONSTITUTION: Plane mirrors 4, 5 are stood on a table 8 moving rectilinearly in parallel with an ideal rectilinear line 10. The light passed through half mirrors 2, 6 of light from a light source 1 is reflected by the plane mirror 4 disposed vertically and by the half mirror 6 through lenses 9, 11, respectively into a detector 12. The light reflected on the mirror 2 is, on the other hand, reflected on the mirror 3 to pass a half mirror 7 and reflected on the plane mirror 5 vertically disposed with respect to the light, and then reflected on the mirror 7 similarly into a photodetector 12. The straightness is obtained by the optical path difference between both the lights. Since the angle between the light wavelength and the optical path is constant, the straightness can be obtained by the number of the interfering fringes.
COPYRIGHT: (C)1980,JPO&Japio
JP10923378A 1978-09-06 1978-09-06 Straightness measuring interferometer Pending JPS5536728A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10923378A JPS5536728A (en) 1978-09-06 1978-09-06 Straightness measuring interferometer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10923378A JPS5536728A (en) 1978-09-06 1978-09-06 Straightness measuring interferometer

Publications (1)

Publication Number Publication Date
JPS5536728A true JPS5536728A (en) 1980-03-14

Family

ID=14504983

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10923378A Pending JPS5536728A (en) 1978-09-06 1978-09-06 Straightness measuring interferometer

Country Status (1)

Country Link
JP (1) JPS5536728A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008115891A (en) * 2006-10-31 2008-05-22 Inax Corp Hot water-water mixing valve

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008115891A (en) * 2006-10-31 2008-05-22 Inax Corp Hot water-water mixing valve

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