SU700778A1 - Interferometer for measuring the deviation of optical surfaces from flat shape - Google Patents
Interferometer for measuring the deviation of optical surfaces from flat shapeInfo
- Publication number
- SU700778A1 SU700778A1 SU782637058A SU2637058A SU700778A1 SU 700778 A1 SU700778 A1 SU 700778A1 SU 782637058 A SU782637058 A SU 782637058A SU 2637058 A SU2637058 A SU 2637058A SU 700778 A1 SU700778 A1 SU 700778A1
- Authority
- SU
- USSR - Soviet Union
- Prior art keywords
- interferometer
- measuring
- deviation
- optical surfaces
- flat shape
- Prior art date
Links
Landscapes
- Length Measuring Devices By Optical Means (AREA)
Description
(54) ИНТЕРФЕРОМЕТР ДЛЯ ИЗМЕРЕНИЯ НЕПЛОСКОСТНОСТИ ОПТИЧЕСКИХ ПОВЕРХНОСТЕЙ(54) INTERFEROMETER FOR MEASURING THE BALANCE OF OPTICAL SURFACES
Пластина 4 с образцовой поверхностью 5 и контролируема поверхност 15 с изделием 16 образуют интерференционнуго пару. Фотоприемники 10 установлены под штрихами 9 сетки 8 на измери-йвльном столике 7, сто т один против другого под разными штрихами .и попарно соединены по дифференциальной схеме в электронном блоке 13 обработки.Plate 4 with an exemplary surface 5 and a controlled surface 15 with the product 16 form an interference pair. Photodetectors 10 are installed under the strokes 9 of the grid 8 on the measuring table 7, standing one against the other under different strokes. And are pairwise connected in a differential circuit in the electronic processing unit 13.
Источник света должен быть монохроматичным и с малой расходимостью луча, например, газовый лазер.The light source should be monochromatic and with a small divergence of the beam, for example, a gas laser.
Работает интерферометр следующим образом.The interferometer works as follows.
Луч источника света, расширенный коллиматором 2 и отраженный зеркалом 3, проходит интерференционный зазорThe beam of the light source, expanded by the collimator 2 and reflected by the mirror 3, passes the interference gap
Интерференционна , картина в виде полос 17 (см.фиг.2) .благодар малой расходимости луча передаетс без искажений на контрольную сетку 8 и экран 11. Свет, прошедший сквозь штрихи 9, попадает на фотоприемники 10 .Interference, picture in the form of strips 17 (see Fig. 2). The thankfulness of the small divergence of the beam is transmitted without distortion to the control grid 8 and the screen 11. The light passing through the bars 9, falls on the photodetectors 10.
Посредством юстировочного столика 6 onejpaTOp обеспечивает примерную .параллельность интерференционных полос 17 штрихам 9.By means of the adjustment table 6 onejpaTOp provides an approximate parallelism of the interference fringes 17 strokes 9.
При.перемещении измерительного столика 7 с помощью микровинта 12, наблюда картину на Матовом экране ;il по светоиндикаторам 14, определ ют моменты симметричного положени фотоприемников:10 относительно интерференционной полосы дл каждой пары фотоприемников по соответств.ующим им- направлени м I, Ц, III и т.д Снимают показани микровинта 12 в эти моменты и вычисл ют наибольшее искривление интерференционных полосWhen moving the measuring table 7 using a microscrew 12, observe the picture on the Matte screen; il using the LEDs 14, determine the moments of the symmetric position of the photoreceivers: 10 relative to the interference band for each pair of photodetectors according to the corresponding directions I, C, III etc Take the readings of the microscrew 12 at these moments and calculate the greatest distortion of the interference fringes.
дХ и рассто ние между интерференционнь ми полосами X. Величина неплоскост ности провер емой поверхности л€ в дол х длины Л излучени провер етс по формулеdX and the distance between the interference bands of X. The magnitude of the non-flatness of the surface being tested is l in parts of the length L of the radiation checked by the formula
. .. .
. .
В качестве фотоприемников могут быть использованы, например, координатные фотодиоды.For example, coordinate photodiodes can be used as photodetectors.
Claims (1)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| SU782637058A SU700778A1 (en) | 1978-06-28 | 1978-06-28 | Interferometer for measuring the deviation of optical surfaces from flat shape |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| SU782637058A SU700778A1 (en) | 1978-06-28 | 1978-06-28 | Interferometer for measuring the deviation of optical surfaces from flat shape |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| SU700778A1 true SU700778A1 (en) | 1979-11-30 |
Family
ID=20773765
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| SU782637058A SU700778A1 (en) | 1978-06-28 | 1978-06-28 | Interferometer for measuring the deviation of optical surfaces from flat shape |
Country Status (1)
| Country | Link |
|---|---|
| SU (1) | SU700778A1 (en) |
-
1978
- 1978-06-28 SU SU782637058A patent/SU700778A1/en active
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