JPS5534673A - Etching method for cobalt base metallic film - Google Patents
Etching method for cobalt base metallic filmInfo
- Publication number
- JPS5534673A JPS5534673A JP10798878A JP10798878A JPS5534673A JP S5534673 A JPS5534673 A JP S5534673A JP 10798878 A JP10798878 A JP 10798878A JP 10798878 A JP10798878 A JP 10798878A JP S5534673 A JPS5534673 A JP S5534673A
- Authority
- JP
- Japan
- Prior art keywords
- film
- etching
- cobalt base
- erased
- phosphoric acid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
- C23F1/00—Etching metallic material by chemical means
- C23F1/10—Etching compositions
- C23F1/14—Aqueous compositions
- C23F1/16—Acidic compositions
- C23F1/28—Acidic compositions for etching iron group metals
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- ing And Chemical Polishing (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10798878A JPS6053754B2 (ja) | 1978-08-31 | 1978-08-31 | コバルト系金属膜のエツチング方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10798878A JPS6053754B2 (ja) | 1978-08-31 | 1978-08-31 | コバルト系金属膜のエツチング方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5534673A true JPS5534673A (en) | 1980-03-11 |
JPS6053754B2 JPS6053754B2 (ja) | 1985-11-27 |
Family
ID=14473129
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10798878A Expired JPS6053754B2 (ja) | 1978-08-31 | 1978-08-31 | コバルト系金属膜のエツチング方法 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6053754B2 (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5617368A (en) * | 1979-07-16 | 1981-02-19 | Xerox Corp | Development device |
US4677092A (en) * | 1983-01-17 | 1987-06-30 | International Fuel Cells Corporation | Ordered ternary fuel cell catalysts containing platinum and cobalt and method for making the catalysts |
-
1978
- 1978-08-31 JP JP10798878A patent/JPS6053754B2/ja not_active Expired
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5617368A (en) * | 1979-07-16 | 1981-02-19 | Xerox Corp | Development device |
JPH0149946B2 (ja) * | 1979-07-16 | 1989-10-26 | Xerox Corp | |
US4677092A (en) * | 1983-01-17 | 1987-06-30 | International Fuel Cells Corporation | Ordered ternary fuel cell catalysts containing platinum and cobalt and method for making the catalysts |
Also Published As
Publication number | Publication date |
---|---|
JPS6053754B2 (ja) | 1985-11-27 |
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