JPS5533123A - Making method of photo mask for both side - Google Patents

Making method of photo mask for both side

Info

Publication number
JPS5533123A
JPS5533123A JP10598178A JP10598178A JPS5533123A JP S5533123 A JPS5533123 A JP S5533123A JP 10598178 A JP10598178 A JP 10598178A JP 10598178 A JP10598178 A JP 10598178A JP S5533123 A JPS5533123 A JP S5533123A
Authority
JP
Japan
Prior art keywords
pattern
original picture
working mask
working
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10598178A
Other languages
Japanese (ja)
Other versions
JPS6053308B2 (en
Inventor
Shigeo Nakamura
Isao Kojima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP53105981A priority Critical patent/JPS6053308B2/en
Publication of JPS5533123A publication Critical patent/JPS5533123A/en
Publication of JPS6053308B2 publication Critical patent/JPS6053308B2/en
Expired legal-status Critical Current

Links

Landscapes

  • Preparing Plates And Mask In Photomechanical Process (AREA)

Abstract

PURPOSE: To obtain the working masks of front and back a pair with the same accuracy by making the working mask for the front side and the working mask for the back side under the same conditions by the specific method.
CONSTITUTION: A film 41' for original picture is set to the pattern plate 7 of an automatic drawing device and a pattern B0 for the back side is made. This original picture is printed once and reversed to obtain a working mask 4'. To obtain the working mask for the front side, the pattern plate 7 placed with a film 41' is rotated 90° from the (a) state to the 7' state of (b) and the film 41a is set by means of reference pins 12a, 13a. Next, with the values of only the data in the Y direction of the control unit of the automatic drawing device being switched to + - opposite polarities, the pattern is drawn automatically, whereby the original picture pattern A0' is obtained. This original picture 41a is printed once and reversed to obtain the working mask 4a for the front side having the pattern of A1'. In this way, both masks are made to the same accuracy by exactly the same process.
COPYRIGHT: (C)1980,JPO&Japio
JP53105981A 1978-08-30 1978-08-30 How to make a double-sided photomask Expired JPS6053308B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP53105981A JPS6053308B2 (en) 1978-08-30 1978-08-30 How to make a double-sided photomask

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP53105981A JPS6053308B2 (en) 1978-08-30 1978-08-30 How to make a double-sided photomask

Publications (2)

Publication Number Publication Date
JPS5533123A true JPS5533123A (en) 1980-03-08
JPS6053308B2 JPS6053308B2 (en) 1985-11-25

Family

ID=14421916

Family Applications (1)

Application Number Title Priority Date Filing Date
JP53105981A Expired JPS6053308B2 (en) 1978-08-30 1978-08-30 How to make a double-sided photomask

Country Status (1)

Country Link
JP (1) JPS6053308B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5869240A (en) * 1981-10-22 1983-04-25 Mitsubishi Monsanto Chem Co Agricultural vinyl chloride resin film
US5560297A (en) * 1993-08-28 1996-10-01 Pamarco Europe Limited Method of mounting a printing plate on a mounting sheet

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5869240A (en) * 1981-10-22 1983-04-25 Mitsubishi Monsanto Chem Co Agricultural vinyl chloride resin film
JPH0134782B2 (en) * 1981-10-22 1989-07-20 Mitsubishi Kasei Vinyl
US5560297A (en) * 1993-08-28 1996-10-01 Pamarco Europe Limited Method of mounting a printing plate on a mounting sheet

Also Published As

Publication number Publication date
JPS6053308B2 (en) 1985-11-25

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