JPS5533123A - Making method of photo mask for both side - Google Patents
Making method of photo mask for both sideInfo
- Publication number
- JPS5533123A JPS5533123A JP10598178A JP10598178A JPS5533123A JP S5533123 A JPS5533123 A JP S5533123A JP 10598178 A JP10598178 A JP 10598178A JP 10598178 A JP10598178 A JP 10598178A JP S5533123 A JPS5533123 A JP S5533123A
- Authority
- JP
- Japan
- Prior art keywords
- pattern
- original picture
- working mask
- working
- film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Preparing Plates And Mask In Photomechanical Process (AREA)
Abstract
PURPOSE: To obtain the working masks of front and back a pair with the same accuracy by making the working mask for the front side and the working mask for the back side under the same conditions by the specific method.
CONSTITUTION: A film 41' for original picture is set to the pattern plate 7 of an automatic drawing device and a pattern B0 for the back side is made. This original picture is printed once and reversed to obtain a working mask 4'. To obtain the working mask for the front side, the pattern plate 7 placed with a film 41' is rotated 90° from the (a) state to the 7' state of (b) and the film 41a is set by means of reference pins 12a, 13a. Next, with the values of only the data in the Y direction of the control unit of the automatic drawing device being switched to + - opposite polarities, the pattern is drawn automatically, whereby the original picture pattern A0' is obtained. This original picture 41a is printed once and reversed to obtain the working mask 4a for the front side having the pattern of A1'. In this way, both masks are made to the same accuracy by exactly the same process.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP53105981A JPS6053308B2 (en) | 1978-08-30 | 1978-08-30 | How to make a double-sided photomask |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP53105981A JPS6053308B2 (en) | 1978-08-30 | 1978-08-30 | How to make a double-sided photomask |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5533123A true JPS5533123A (en) | 1980-03-08 |
JPS6053308B2 JPS6053308B2 (en) | 1985-11-25 |
Family
ID=14421916
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP53105981A Expired JPS6053308B2 (en) | 1978-08-30 | 1978-08-30 | How to make a double-sided photomask |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6053308B2 (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5869240A (en) * | 1981-10-22 | 1983-04-25 | Mitsubishi Monsanto Chem Co | Agricultural vinyl chloride resin film |
US5560297A (en) * | 1993-08-28 | 1996-10-01 | Pamarco Europe Limited | Method of mounting a printing plate on a mounting sheet |
-
1978
- 1978-08-30 JP JP53105981A patent/JPS6053308B2/en not_active Expired
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5869240A (en) * | 1981-10-22 | 1983-04-25 | Mitsubishi Monsanto Chem Co | Agricultural vinyl chloride resin film |
JPH0134782B2 (en) * | 1981-10-22 | 1989-07-20 | Mitsubishi Kasei Vinyl | |
US5560297A (en) * | 1993-08-28 | 1996-10-01 | Pamarco Europe Limited | Method of mounting a printing plate on a mounting sheet |
Also Published As
Publication number | Publication date |
---|---|
JPS6053308B2 (en) | 1985-11-25 |
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