JPS5533092A - Pressure transducer having piezooresistance sensor electrically shielded - Google Patents

Pressure transducer having piezooresistance sensor electrically shielded

Info

Publication number
JPS5533092A
JPS5533092A JP9516179A JP9516179A JPS5533092A JP S5533092 A JPS5533092 A JP S5533092A JP 9516179 A JP9516179 A JP 9516179A JP 9516179 A JP9516179 A JP 9516179A JP S5533092 A JPS5533092 A JP S5533092A
Authority
JP
Japan
Prior art keywords
piezooresistance
pressure transducer
sensor electrically
electrically shielded
shielded
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9516179A
Other languages
English (en)
Japanese (ja)
Inventor
Tomasu Aburomaiteisu Andore
Eru Kurekumeri Rojiyaa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Babcock and Wilcox Co
Original Assignee
Babcock and Wilcox Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Babcock and Wilcox Co filed Critical Babcock and Wilcox Co
Publication of JPS5533092A publication Critical patent/JPS5533092A/ja
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
    • G01L9/0052—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements
    • G01L9/0054—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements integral with a semiconducting diaphragm
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/84—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by variation of applied mechanical force, e.g. of pressure

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Ceramic Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Computer Hardware Design (AREA)
  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)
JP9516179A 1978-08-28 1979-07-27 Pressure transducer having piezooresistance sensor electrically shielded Pending JPS5533092A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US93730478A 1978-08-28 1978-08-28

Publications (1)

Publication Number Publication Date
JPS5533092A true JPS5533092A (en) 1980-03-08

Family

ID=25469756

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9516179A Pending JPS5533092A (en) 1978-08-28 1979-07-27 Pressure transducer having piezooresistance sensor electrically shielded

Country Status (9)

Country Link
JP (1) JPS5533092A (pt)
AU (1) AU503379B1 (pt)
BR (1) BR7902641A (pt)
CA (1) CA1134021A (pt)
DE (1) DE2921043C2 (pt)
ES (2) ES480075A1 (pt)
FR (1) FR2435022A1 (pt)
GB (1) GB2029094B (pt)
IT (1) IT1112793B (pt)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5796573A (en) * 1980-12-08 1982-06-15 Hitachi Ltd Semiconductor strain transducer
US4618844A (en) * 1982-05-14 1986-10-21 Hitachi, Ltd. Semiconductor pressure transducer

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4327350A (en) * 1979-07-17 1982-04-27 Data Instruments, Inc. Pressure transducer
JPS59230101A (ja) * 1983-06-13 1984-12-24 Tokyo Electric Co Ltd 歪センサ
CA1314410C (en) * 1986-12-08 1993-03-16 Masanori Nishiguchi Wiring structure of semiconductor pressure sensor
FR2643148B1 (fr) * 1989-02-15 1991-12-06 Schlumberger Ind Sa Capteur de pression du type semiconducteur sur isolant
DE102007057877A1 (de) 2007-11-29 2009-06-04 Endress + Hauser Gmbh + Co. Kg Drucksensor
CN116222839B (zh) * 2023-05-09 2023-07-18 苏州亿波达光电子科技有限公司 一种感测元件及压力传感器

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE875879C (de) * 1951-07-25 1953-05-07 Land Abschirmverfahren fuer Dehnungsmessstreifen
GB1265018A (pt) * 1968-08-27 1972-03-01
US4050049A (en) * 1976-02-09 1977-09-20 Signetics Corporation Solid state force transducer, support and method of making same
FR2367280A1 (fr) * 1976-10-08 1978-05-05 Schlumberger Ind Sa Capteur a jauges de contrainte equipe d'une sonde de temperature
JPS54131892A (en) * 1978-04-05 1979-10-13 Hitachi Ltd Semiconductor pressure converter

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5796573A (en) * 1980-12-08 1982-06-15 Hitachi Ltd Semiconductor strain transducer
JPH0241183B2 (pt) * 1980-12-08 1990-09-14 Hitachi Ltd
US4618844A (en) * 1982-05-14 1986-10-21 Hitachi, Ltd. Semiconductor pressure transducer

Also Published As

Publication number Publication date
BR7902641A (pt) 1980-03-18
DE2921043A1 (de) 1980-03-13
ES480075A1 (es) 1979-11-16
CA1134021A (en) 1982-10-19
AU503379B1 (en) 1979-08-30
FR2435022A1 (fr) 1980-03-28
GB2029094B (en) 1983-01-26
IT7922259A0 (it) 1979-04-30
IT1112793B (it) 1986-01-20
FR2435022B1 (pt) 1983-04-01
GB2029094A (en) 1980-03-12
DE2921043C2 (de) 1985-07-04
ES480076A1 (es) 1979-11-16

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