JPS5523746Y2 - - Google Patents
Info
- Publication number
- JPS5523746Y2 JPS5523746Y2 JP1976012362U JP1236276U JPS5523746Y2 JP S5523746 Y2 JPS5523746 Y2 JP S5523746Y2 JP 1976012362 U JP1976012362 U JP 1976012362U JP 1236276 U JP1236276 U JP 1236276U JP S5523746 Y2 JPS5523746 Y2 JP S5523746Y2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/301—Arrangements enabling beams to pass between regions of different pressure
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/18—Vacuum locks ; Means for obtaining or maintaining the desired pressure within the vessel
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Welding Or Cutting Using Electron Beams (AREA)
- Treatments Of Macromolecular Shaped Articles (AREA)
Priority Applications (8)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1976012362U JPS5523746Y2 (US20020051482A1-20020502-M00020.png) | 1976-02-05 | 1976-02-05 | |
| GB2732/77A GB1516484A (en) | 1976-02-05 | 1977-01-24 | Electron beam machining apparatus |
| US05/762,402 US4080526A (en) | 1976-02-05 | 1977-01-26 | Electron beam machining apparatus of the dynamic seal type |
| NO77770307A NO143867C (no) | 1976-02-05 | 1977-01-31 | Elektronstraale-bearbeidelses-apparat med dynamisk tetning |
| SE7701126A SE410831B (sv) | 1976-02-05 | 1977-02-02 | Anordning for bearbetning medelst elektronstrale |
| NLAANVRAGE7701166,A NL177638C (nl) | 1976-02-05 | 1977-02-03 | Met een electronenbundel werkende bewerkingsmachine met meebewegende afdichtband. |
| FR7702980A FR2340168A1 (fr) | 1976-02-05 | 1977-02-03 | Appareil de soudage par faisceau d'electrons du type a joint dynamique |
| DE2704687A DE2704687C3 (de) | 1976-02-05 | 1977-02-04 | Dynamisch abgedichtete Elektronenstrahlbearbeitungsvorrichtung |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1976012362U JPS5523746Y2 (US20020051482A1-20020502-M00020.png) | 1976-02-05 | 1976-02-05 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS52104191U JPS52104191U (US20020051482A1-20020502-M00020.png) | 1977-08-08 |
| JPS5523746Y2 true JPS5523746Y2 (US20020051482A1-20020502-M00020.png) | 1980-06-06 |
Family
ID=11803153
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1976012362U Expired JPS5523746Y2 (US20020051482A1-20020502-M00020.png) | 1976-02-05 | 1976-02-05 |
Country Status (8)
Families Citing this family (22)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| IT1104654B (it) * | 1977-05-27 | 1985-10-21 | Steigerwald Strahltech | Perfezionamento nelle macchine per la lavorazione di pezzi metallici con fasci di particelle cariche |
| US4162391A (en) * | 1977-12-19 | 1979-07-24 | Sciaky Bros., Inc. | Sliding vacuum seal means |
| DE2819993C3 (de) * | 1978-05-08 | 1982-01-28 | Dr.-Ing. Rudolf Hell Gmbh, 2300 Kiel | Mundstück zur Ankoppelung einer Elektronenstrahlkanone an Druckformzylinder |
| JPS5844938Y2 (ja) * | 1978-05-17 | 1983-10-12 | 三菱重工業株式会社 | 円筒部材の電子ビ−ム加工装置 |
| FR2481174A1 (fr) * | 1980-04-25 | 1981-10-30 | Petroles Cie Francaise | Chambre de soudage a vide pour le soudage bout a bout par faisceau d'electrons de pieces allongees et procede d'utilisation d'une telle chambre |
| FR2481173A1 (fr) * | 1980-04-25 | 1981-10-30 | Petroles Cie Francaise | Chambre de soudage par faisceau d'electrons pour l'assemblage bout a bout de pieces allongees |
| US4425508A (en) * | 1982-05-07 | 1984-01-10 | Gca Corporation | Electron beam lithographic apparatus |
| FR2571995B1 (fr) * | 1984-10-22 | 1986-12-26 | Soudure Autogene Francaise | Machine pour le soudage externe de tubes bout a bout, par faisceau d'electrons |
| CS267642B1 (en) * | 1987-12-18 | 1990-02-12 | Josef Ing Melkes | Portable rastering electron microscope |
| US5170028A (en) * | 1989-08-28 | 1992-12-08 | Hitachi, Ltd. | Process and apparatus, for electron beam welding of a member partially enclosed in vacuum chamber, and the member formed thereby |
| NL1026547C2 (nl) * | 2004-07-01 | 2006-01-03 | Fei Co | Apparaat voor het evacueren van een sample. |
| US7301157B2 (en) * | 2005-09-28 | 2007-11-27 | Fei Company | Cluster tool for microscopic processing of samples |
| US20070199930A1 (en) * | 2006-02-22 | 2007-08-30 | Mecco Partnership, Llc | Laser marking system |
| CN101461026B (zh) | 2006-06-07 | 2012-01-18 | Fei公司 | 与包含真空室的装置一起使用的滑动轴承 |
| JP5033873B2 (ja) * | 2006-06-07 | 2012-09-26 | エフ イー アイ カンパニ | 真空チャンバを有する機器とともに使用されるスライダベアリング |
| DE102009039621B4 (de) * | 2009-09-01 | 2012-06-28 | Global Beam Technologies Ag | Teilchenstrahlbearbeitungsvorrichtung wie eine Elektronenstrahlbearbeitungsvorrichtung |
| US9383037B2 (en) | 2010-01-28 | 2016-07-05 | Vat Holding Ag | Device for closing an opening in a chamber wall |
| US9375804B2 (en) * | 2011-07-27 | 2016-06-28 | GM Global Technology Operations LLC | Low pressure electron beam welding of Li-ion battery connections |
| DE102012202330B4 (de) * | 2012-02-16 | 2017-08-17 | Trumpf Laser Gmbh | Laserbearbeitungsvorrichtung mit einem relativ zu einer Spannpratze beweglichen Laserbearbeitungskopf |
| JP6037741B2 (ja) * | 2012-09-18 | 2016-12-07 | 三菱重工工作機械株式会社 | 移動型真空溶接装置 |
| GB201609995D0 (en) | 2016-06-08 | 2016-07-20 | Aquasium Technology Ltd | Shaped welding head |
| CN109643629B (zh) * | 2016-08-22 | 2021-07-02 | 应用材料公司 | 用于真空腔室的门密封件 |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| BE634718A (US20020051482A1-20020502-M00020.png) * | 1962-07-11 | |||
| US3466487A (en) * | 1967-06-16 | 1969-09-09 | United Aircraft Corp | Device for moving a beam of charged particles |
| US3465119A (en) * | 1967-06-21 | 1969-09-02 | United Aircraft Corp | Multiaxis optical viewing system of a movable electron beam in a vacuum chamber |
| US3588463A (en) * | 1969-09-08 | 1971-06-28 | United Aircraft Corp | Method and apparatus for tracking a seam |
| US3748432A (en) * | 1971-12-27 | 1973-07-24 | Boeing Co | Apparatus for welding corrugated materials by plasma electron beam welding system |
-
1976
- 1976-02-05 JP JP1976012362U patent/JPS5523746Y2/ja not_active Expired
-
1977
- 1977-01-24 GB GB2732/77A patent/GB1516484A/en not_active Expired
- 1977-01-26 US US05/762,402 patent/US4080526A/en not_active Expired - Lifetime
- 1977-01-31 NO NO77770307A patent/NO143867C/no unknown
- 1977-02-02 SE SE7701126A patent/SE410831B/xx unknown
- 1977-02-03 FR FR7702980A patent/FR2340168A1/fr active Granted
- 1977-02-03 NL NLAANVRAGE7701166,A patent/NL177638C/xx not_active IP Right Cessation
- 1977-02-04 DE DE2704687A patent/DE2704687C3/de not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| NO770307L (no) | 1977-08-08 |
| NL177638B (nl) | 1985-05-17 |
| NO143867B (no) | 1981-01-19 |
| DE2704687C3 (de) | 1981-02-19 |
| FR2340168B1 (US20020051482A1-20020502-M00020.png) | 1981-05-29 |
| JPS52104191U (US20020051482A1-20020502-M00020.png) | 1977-08-08 |
| NL7701166A (nl) | 1977-08-09 |
| SE410831B (sv) | 1979-11-12 |
| GB1516484A (en) | 1978-07-05 |
| NO143867C (no) | 1981-04-29 |
| DE2704687B2 (de) | 1980-06-12 |
| NL177638C (nl) | 1985-10-16 |
| SE7701126L (sv) | 1977-08-06 |
| DE2704687A1 (de) | 1977-08-11 |
| US4080526A (en) | 1978-03-21 |
| FR2340168A1 (fr) | 1977-09-02 |
