JPS5522275A - Manufacture of thin-film magnetic head - Google Patents
Manufacture of thin-film magnetic headInfo
- Publication number
- JPS5522275A JPS5522275A JP9510478A JP9510478A JPS5522275A JP S5522275 A JPS5522275 A JP S5522275A JP 9510478 A JP9510478 A JP 9510478A JP 9510478 A JP9510478 A JP 9510478A JP S5522275 A JPS5522275 A JP S5522275A
- Authority
- JP
- Japan
- Prior art keywords
- magnetic substance
- insulator film
- substance layer
- coat
- chelate compound
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Magnetic Heads (AREA)
Abstract
PURPOSE: To secure formation of the insulator film composed of Al2O3 which features a high insulation and is free from pinholes onto the lower magnetic substance layer impossible for the anode formation by applying the solution containing the Al chelate compound and then giving the heat oxidation to the coat.
CONSTITUTION: The solution composed by dissolving the Al chelate compound into the organic solvent is applied on the surface of lower magnetic substance layer 10 composed of the permalloy provided on substrate 100. This coat is then heated up to 200W400°C to be formed into insulator film 200 of the Al2O3 group. Then SiO insulator film 20 is formed on film 200 by the sputtering and other methods, and then coil conductors 30aW33a and upper magnetic substance layer 11 are laminated via the insulated layer to form the pole face surface. As a result, the adjustment of the gap length via etching can be omitted, thus increasing the production yield.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9510478A JPS5522275A (en) | 1978-08-04 | 1978-08-04 | Manufacture of thin-film magnetic head |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9510478A JPS5522275A (en) | 1978-08-04 | 1978-08-04 | Manufacture of thin-film magnetic head |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5522275A true JPS5522275A (en) | 1980-02-16 |
Family
ID=14128556
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9510478A Pending JPS5522275A (en) | 1978-08-04 | 1978-08-04 | Manufacture of thin-film magnetic head |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5522275A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63121670A (en) * | 1986-11-10 | 1988-05-25 | Toshiba Corp | Thin 'permalloy(r)' strip |
JPH07176014A (en) * | 1991-05-02 | 1995-07-14 | Internatl Business Mach Corp <Ibm> | Magnetic head with improved pole tip and its manufacture |
-
1978
- 1978-08-04 JP JP9510478A patent/JPS5522275A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63121670A (en) * | 1986-11-10 | 1988-05-25 | Toshiba Corp | Thin 'permalloy(r)' strip |
JPH07176014A (en) * | 1991-05-02 | 1995-07-14 | Internatl Business Mach Corp <Ibm> | Magnetic head with improved pole tip and its manufacture |
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