JPS5521056A - Laser scanning microscopic apparatus - Google Patents
Laser scanning microscopic apparatusInfo
- Publication number
- JPS5521056A JPS5521056A JP9380978A JP9380978A JPS5521056A JP S5521056 A JPS5521056 A JP S5521056A JP 9380978 A JP9380978 A JP 9380978A JP 9380978 A JP9380978 A JP 9380978A JP S5521056 A JPS5521056 A JP S5521056A
- Authority
- JP
- Japan
- Prior art keywords
- circuit
- generating circuit
- pulse
- light absorption
- specimen
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Lasers (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
- Tests Of Electronic Circuits (AREA)
- Microscoopes, Condenser (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9380978A JPS5521056A (en) | 1978-08-01 | 1978-08-01 | Laser scanning microscopic apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9380978A JPS5521056A (en) | 1978-08-01 | 1978-08-01 | Laser scanning microscopic apparatus |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5521056A true JPS5521056A (en) | 1980-02-14 |
JPS6339099B2 JPS6339099B2 (enrdf_load_stackoverflow) | 1988-08-03 |
Family
ID=14092723
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9380978A Granted JPS5521056A (en) | 1978-08-01 | 1978-08-01 | Laser scanning microscopic apparatus |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5521056A (enrdf_load_stackoverflow) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6191985A (ja) * | 1984-10-09 | 1986-05-10 | アエロンカ・エレクトロニクス・インコーポレーテッド | 小型レ−ザ走査装置 |
US7554722B2 (en) * | 2005-10-06 | 2009-06-30 | Leica Microsystems Cms Gmbh | Scanning microscope with scanner frequency derived from pulsed laser |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4667571B2 (ja) * | 1999-09-24 | 2011-04-13 | オリンパス株式会社 | レーザ走査顕微鏡 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4828176A (enrdf_load_stackoverflow) * | 1971-08-16 | 1973-04-13 | ||
JPS5242379A (en) * | 1975-10-01 | 1977-04-01 | Hitachi Ltd | Method of inspecting pinholes of insulating film formed on semiconduct or surface |
JPS5328375A (en) * | 1976-08-11 | 1978-03-16 | Fujitsu Ltd | Inspecting method |
-
1978
- 1978-08-01 JP JP9380978A patent/JPS5521056A/ja active Granted
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4828176A (enrdf_load_stackoverflow) * | 1971-08-16 | 1973-04-13 | ||
JPS5242379A (en) * | 1975-10-01 | 1977-04-01 | Hitachi Ltd | Method of inspecting pinholes of insulating film formed on semiconduct or surface |
JPS5328375A (en) * | 1976-08-11 | 1978-03-16 | Fujitsu Ltd | Inspecting method |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6191985A (ja) * | 1984-10-09 | 1986-05-10 | アエロンカ・エレクトロニクス・インコーポレーテッド | 小型レ−ザ走査装置 |
US7554722B2 (en) * | 2005-10-06 | 2009-06-30 | Leica Microsystems Cms Gmbh | Scanning microscope with scanner frequency derived from pulsed laser |
Also Published As
Publication number | Publication date |
---|---|
JPS6339099B2 (enrdf_load_stackoverflow) | 1988-08-03 |
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