JPS6339099B2 - - Google Patents

Info

Publication number
JPS6339099B2
JPS6339099B2 JP53093809A JP9380978A JPS6339099B2 JP S6339099 B2 JPS6339099 B2 JP S6339099B2 JP 53093809 A JP53093809 A JP 53093809A JP 9380978 A JP9380978 A JP 9380978A JP S6339099 B2 JPS6339099 B2 JP S6339099B2
Authority
JP
Japan
Prior art keywords
sample
circuit
light absorption
absorption current
signal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP53093809A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5521056A (en
Inventor
Masashi Nagase
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CHO ERU ESU AI GIJUTSU KENKYU KUMIAI
Original Assignee
CHO ERU ESU AI GIJUTSU KENKYU KUMIAI
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by CHO ERU ESU AI GIJUTSU KENKYU KUMIAI filed Critical CHO ERU ESU AI GIJUTSU KENKYU KUMIAI
Priority to JP9380978A priority Critical patent/JPS5521056A/ja
Publication of JPS5521056A publication Critical patent/JPS5521056A/ja
Publication of JPS6339099B2 publication Critical patent/JPS6339099B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Lasers (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Tests Of Electronic Circuits (AREA)
  • Microscoopes, Condenser (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP9380978A 1978-08-01 1978-08-01 Laser scanning microscopic apparatus Granted JPS5521056A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9380978A JPS5521056A (en) 1978-08-01 1978-08-01 Laser scanning microscopic apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9380978A JPS5521056A (en) 1978-08-01 1978-08-01 Laser scanning microscopic apparatus

Publications (2)

Publication Number Publication Date
JPS5521056A JPS5521056A (en) 1980-02-14
JPS6339099B2 true JPS6339099B2 (enrdf_load_stackoverflow) 1988-08-03

Family

ID=14092723

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9380978A Granted JPS5521056A (en) 1978-08-01 1978-08-01 Laser scanning microscopic apparatus

Country Status (1)

Country Link
JP (1) JPS5521056A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001159734A (ja) * 1999-09-24 2001-06-12 Olympus Optical Co Ltd レーザ走査顕微鏡

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4630276A (en) * 1984-10-09 1986-12-16 Aeronca Electronics, Inc. Compact laser scanning system
DE102005047884A1 (de) * 2005-10-06 2007-04-26 Leica Microsystems Cms Gmbh Scanmikroskop und Scanverfahren mit einem Scanmikroskop

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5137867B2 (enrdf_load_stackoverflow) * 1971-08-16 1976-10-18
JPS5242379A (en) * 1975-10-01 1977-04-01 Hitachi Ltd Method of inspecting pinholes of insulating film formed on semiconduct or surface
JPS5328375A (en) * 1976-08-11 1978-03-16 Fujitsu Ltd Inspecting method

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001159734A (ja) * 1999-09-24 2001-06-12 Olympus Optical Co Ltd レーザ走査顕微鏡

Also Published As

Publication number Publication date
JPS5521056A (en) 1980-02-14

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