JPS5519885A - Color solid imaging element plate - Google Patents
Color solid imaging element plateInfo
- Publication number
- JPS5519885A JPS5519885A JP9299278A JP9299278A JPS5519885A JP S5519885 A JPS5519885 A JP S5519885A JP 9299278 A JP9299278 A JP 9299278A JP 9299278 A JP9299278 A JP 9299278A JP S5519885 A JPS5519885 A JP S5519885A
- Authority
- JP
- Japan
- Prior art keywords
- photo
- film
- electrodes
- portions
- imaging element
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000003384 imaging method Methods 0.000 title abstract 3
- 239000007787 solid Substances 0.000 title abstract 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 4
- 239000011347 resin Substances 0.000 abstract 4
- 229920005989 resin Polymers 0.000 abstract 4
- 229910052681 coesite Inorganic materials 0.000 abstract 2
- 229910052906 cristobalite Inorganic materials 0.000 abstract 2
- 238000004043 dyeing Methods 0.000 abstract 2
- 238000003801 milling Methods 0.000 abstract 2
- 239000000377 silicon dioxide Substances 0.000 abstract 2
- 235000012239 silicon dioxide Nutrition 0.000 abstract 2
- 229910052682 stishovite Inorganic materials 0.000 abstract 2
- 229910052905 tridymite Inorganic materials 0.000 abstract 2
- 230000002265 prevention Effects 0.000 abstract 1
- 238000002310 reflectometry Methods 0.000 abstract 1
- 239000000758 substrate Substances 0.000 abstract 1
- ANRHNWWPFJCPAZ-UHFFFAOYSA-M thionine Chemical compound [Cl-].C1=CC(N)=CC2=[S+]C3=CC(N)=CC=C3N=C21 ANRHNWWPFJCPAZ-UHFFFAOYSA-M 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/148—Charge coupled imagers
- H01L27/14868—CCD or CID colour imagers
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Electromagnetism (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Optical Filters (AREA)
- Solid State Image Pick-Up Elements (AREA)
- Transforming Light Signals Into Electric Signals (AREA)
- Color Television Image Signal Generators (AREA)
Abstract
PURPOSE:To effect the reduction in size, weight and price and the improvement in resolution by providing the colored filters with different spactral characteristics each other on the plural photosensitive portions of solid imaging element photo detecting surface, and forming the shading layer with low reflectivity in the areas other than photo-sensitive portions. CONSTITUTION:On a Si substrate 21 coated is a SiO2 film 22, on which polycrystal Si electrodes 23 are provided in the predetermined pattern. Another SiO2 film 22 is covered again over all the surface and Al electrodes 24 are applied at the positions corresponding to the electrodes 23. In such a way, solid imaging element plate is arranged where the portions between electrodes 24 serve as photo-sensitive portions which is filled with dyed resin films 28. Next, a dyeing prevention resin film 29 is coated to leave one photo-sensitive portion 25 to be exposed and the corresponding film 28 is changed to a red filter 30 through dyeing with use of kayanol milling red. After that, a new resin film 29 is coated in place of the previous resin film to change the adjacent film 28 into a green filter 31 with use of bril- liand indo blue. Similarey, a blue filter 32 is formed with use of kayanol cyanine. Finally, shading films 36 are applied on the area other than photo-sensitive portions 25 with use of suminol milling black.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9299278A JPS5519885A (en) | 1978-07-29 | 1978-07-29 | Color solid imaging element plate |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9299278A JPS5519885A (en) | 1978-07-29 | 1978-07-29 | Color solid imaging element plate |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5519885A true JPS5519885A (en) | 1980-02-12 |
Family
ID=14069853
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9299278A Pending JPS5519885A (en) | 1978-07-29 | 1978-07-29 | Color solid imaging element plate |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5519885A (en) |
Cited By (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5735807A (en) * | 1980-08-13 | 1982-02-26 | Hitachi Ltd | Manufacture of color filter |
JPS5830284A (en) * | 1981-08-17 | 1983-02-22 | Nec Corp | Solid-state image pickup device |
JPS5843571A (en) * | 1981-09-08 | 1983-03-14 | Toshiba Corp | Solid state color image pickup device |
JPS5866470A (en) * | 1981-10-16 | 1983-04-20 | Nec Corp | Solid-state image pickup device |
JPS5888706A (en) * | 1981-11-10 | 1983-05-26 | エヌ・ベ−・フイリツプス・フル−イランペンフアブリケン | Color video apparatus and manufacture thereof |
JPS58162180A (en) * | 1982-03-23 | 1983-09-26 | Toshiba Corp | Solid-state image pickup device for color |
JPS59116910U (en) * | 1983-01-28 | 1984-08-07 | 大日本印刷株式会社 | color separation filter |
JPS60247603A (en) * | 1984-05-24 | 1985-12-07 | Toppan Printing Co Ltd | Color filter |
JPS6199103A (en) * | 1984-10-17 | 1986-05-17 | Sanyo Kokusaku Pulp Co Ltd | Preparation of color filter |
JPS6199102A (en) * | 1984-10-17 | 1986-05-17 | Sanyo Kokusaku Pulp Co Ltd | Preparation of color filter |
JPS62191804A (en) * | 1986-02-18 | 1987-08-22 | Toppan Printing Co Ltd | Method for retouching color filter |
JPS6362358A (en) * | 1986-09-03 | 1988-03-18 | Nec Corp | Solid-state image sensing device |
JPH02285676A (en) * | 1989-04-27 | 1990-11-22 | Toppan Printing Co Ltd | Solid-state image sensing device |
JPH03109525A (en) * | 1990-08-30 | 1991-05-09 | Seiko Epson Corp | Image display device |
JPH03120866A (en) * | 1989-10-04 | 1991-05-23 | Nec Corp | Filter for solid-state image sensing device |
-
1978
- 1978-07-29 JP JP9299278A patent/JPS5519885A/en active Pending
Cited By (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH027041B2 (en) * | 1980-08-13 | 1990-02-15 | Hitachi Ltd | |
JPS5735807A (en) * | 1980-08-13 | 1982-02-26 | Hitachi Ltd | Manufacture of color filter |
JPS5830284A (en) * | 1981-08-17 | 1983-02-22 | Nec Corp | Solid-state image pickup device |
JPS5843571A (en) * | 1981-09-08 | 1983-03-14 | Toshiba Corp | Solid state color image pickup device |
JPS5866470A (en) * | 1981-10-16 | 1983-04-20 | Nec Corp | Solid-state image pickup device |
JPS5888706A (en) * | 1981-11-10 | 1983-05-26 | エヌ・ベ−・フイリツプス・フル−イランペンフアブリケン | Color video apparatus and manufacture thereof |
JPS58162180A (en) * | 1982-03-23 | 1983-09-26 | Toshiba Corp | Solid-state image pickup device for color |
JPS59116910U (en) * | 1983-01-28 | 1984-08-07 | 大日本印刷株式会社 | color separation filter |
JPS60247603A (en) * | 1984-05-24 | 1985-12-07 | Toppan Printing Co Ltd | Color filter |
JPH0570122B2 (en) * | 1984-05-24 | 1993-10-04 | Toppan Printing Co Ltd | |
JPS6199102A (en) * | 1984-10-17 | 1986-05-17 | Sanyo Kokusaku Pulp Co Ltd | Preparation of color filter |
JPH0477282B2 (en) * | 1984-10-17 | 1992-12-08 | Sanyo Kokusaku Parupu Kk | |
JPS6199103A (en) * | 1984-10-17 | 1986-05-17 | Sanyo Kokusaku Pulp Co Ltd | Preparation of color filter |
JPS62191804A (en) * | 1986-02-18 | 1987-08-22 | Toppan Printing Co Ltd | Method for retouching color filter |
JPS6362358A (en) * | 1986-09-03 | 1988-03-18 | Nec Corp | Solid-state image sensing device |
JPH02285676A (en) * | 1989-04-27 | 1990-11-22 | Toppan Printing Co Ltd | Solid-state image sensing device |
JPH03120866A (en) * | 1989-10-04 | 1991-05-23 | Nec Corp | Filter for solid-state image sensing device |
JPH03109525A (en) * | 1990-08-30 | 1991-05-09 | Seiko Epson Corp | Image display device |
JP2586195B2 (en) * | 1990-08-30 | 1997-02-26 | セイコーエプソン株式会社 | Liquid crystal display |
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