JPS5518473A - Ionic radiation sensitive negative type resist - Google Patents
Ionic radiation sensitive negative type resistInfo
- Publication number
- JPS5518473A JPS5518473A JP9237478A JP9237478A JPS5518473A JP S5518473 A JPS5518473 A JP S5518473A JP 9237478 A JP9237478 A JP 9237478A JP 9237478 A JP9237478 A JP 9237478A JP S5518473 A JPS5518473 A JP S5518473A
- Authority
- JP
- Japan
- Prior art keywords
- radiation sensitive
- negative type
- type resist
- sensitive negative
- ionic radiation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: An ionic radiation sensitive negative type resist that is composed of a polymer obtained mainly from a specific vinyl ether monomer, thus being good at sensitivity and etching resistance.
CONSTITUTION: A polymer from at least one selected from vinyl ether monomers of the formula or copolymer thereof with other vinyl monomers is dissolved in an adequate solvent.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9237478A JPS5518473A (en) | 1978-07-28 | 1978-07-28 | Ionic radiation sensitive negative type resist |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9237478A JPS5518473A (en) | 1978-07-28 | 1978-07-28 | Ionic radiation sensitive negative type resist |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5518473A true JPS5518473A (en) | 1980-02-08 |
Family
ID=14052643
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9237478A Pending JPS5518473A (en) | 1978-07-28 | 1978-07-28 | Ionic radiation sensitive negative type resist |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5518473A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59217775A (en) * | 1983-05-24 | 1984-12-07 | Pentel Kk | Ink for ball point pen |
-
1978
- 1978-07-28 JP JP9237478A patent/JPS5518473A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59217775A (en) * | 1983-05-24 | 1984-12-07 | Pentel Kk | Ink for ball point pen |
JPH0578594B2 (en) * | 1983-05-24 | 1993-10-29 | Pentel Kk |
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