JPS5518001A - Semiconductor device and its manufacturing method - Google Patents
Semiconductor device and its manufacturing methodInfo
- Publication number
- JPS5518001A JPS5518001A JP8990778A JP8990778A JPS5518001A JP S5518001 A JPS5518001 A JP S5518001A JP 8990778 A JP8990778 A JP 8990778A JP 8990778 A JP8990778 A JP 8990778A JP S5518001 A JPS5518001 A JP S5518001A
- Authority
- JP
- Japan
- Prior art keywords
- stepped portion
- evaporated
- resist
- constitution
- semiconductor substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Abstract
PURPOSE: To reduce the size of device by taking out electrode leads and by laying wire without causing breakage at the stepped portion of a semiconductor substrate.
CONSTITUTION: An opening is vertically provided by the use of a resist 13 through an oxidized film 12 on a semiconductor substrate 11, and Al 15 is evaporated. After the resist has been lifted off, the opening is filled with Al 16. Then, the second Al layer is evaporated on the entire surface, and patterning is made, thereby the desired electrode-lead wirings are obtained. In this constitution, since there is no breakage in the stepped portion, the electrodes can be provided at the stepped portion having a minimum area without the tapered portion, whereby the size of the device can be reduced.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8990778A JPS5518001A (en) | 1978-07-25 | 1978-07-25 | Semiconductor device and its manufacturing method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8990778A JPS5518001A (en) | 1978-07-25 | 1978-07-25 | Semiconductor device and its manufacturing method |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5518001A true JPS5518001A (en) | 1980-02-07 |
Family
ID=13983778
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8990778A Pending JPS5518001A (en) | 1978-07-25 | 1978-07-25 | Semiconductor device and its manufacturing method |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5518001A (en) |
-
1978
- 1978-07-25 JP JP8990778A patent/JPS5518001A/en active Pending
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