JPS5517112A - Positive type radiation sensitive composition - Google Patents

Positive type radiation sensitive composition

Info

Publication number
JPS5517112A
JPS5517112A JP8897878A JP8897878A JPS5517112A JP S5517112 A JPS5517112 A JP S5517112A JP 8897878 A JP8897878 A JP 8897878A JP 8897878 A JP8897878 A JP 8897878A JP S5517112 A JPS5517112 A JP S5517112A
Authority
JP
Japan
Prior art keywords
resist
positive type
type radiation
radiation sensitive
sensitive composition
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8897878A
Other languages
English (en)
Japanese (ja)
Other versions
JPS571820B2 (enrdf_load_stackoverflow
Inventor
Yuzo Shimazaki
Masanobu Koda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CHIYOU LSI GIJUTSU KENKYU KUMIAI
Original Assignee
CHIYOU LSI GIJUTSU KENKYU KUMIAI
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by CHIYOU LSI GIJUTSU KENKYU KUMIAI filed Critical CHIYOU LSI GIJUTSU KENKYU KUMIAI
Priority to JP8897878A priority Critical patent/JPS5517112A/ja
Publication of JPS5517112A publication Critical patent/JPS5517112A/ja
Publication of JPS571820B2 publication Critical patent/JPS571820B2/ja
Granted legal-status Critical Current

Links

JP8897878A 1978-07-21 1978-07-21 Positive type radiation sensitive composition Granted JPS5517112A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8897878A JPS5517112A (en) 1978-07-21 1978-07-21 Positive type radiation sensitive composition

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8897878A JPS5517112A (en) 1978-07-21 1978-07-21 Positive type radiation sensitive composition

Publications (2)

Publication Number Publication Date
JPS5517112A true JPS5517112A (en) 1980-02-06
JPS571820B2 JPS571820B2 (enrdf_load_stackoverflow) 1982-01-13

Family

ID=13957880

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8897878A Granted JPS5517112A (en) 1978-07-21 1978-07-21 Positive type radiation sensitive composition

Country Status (1)

Country Link
JP (1) JPS5517112A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0061689A1 (en) * 1981-03-27 1982-10-06 Hitachi, Ltd. Radiation sensitive polymer materials

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS632784U (enrdf_load_stackoverflow) * 1986-06-20 1988-01-09

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5165621A (ja) * 1974-12-04 1976-06-07 Process Shizai Gazokeiseiyozairyo
JPS5187971A (en) * 1975-01-29 1976-07-31 Ibm Denjiimushoshanyoru rejisutozo no keiseihoho
JPS5290269A (en) * 1976-01-23 1977-07-29 Nippon Telegr & Teleph Corp <Ntt> Forming method for fine resist patterns
JPS52146217A (en) * 1976-05-31 1977-12-05 Toshiba Corp Positive type radiation sensitive material

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5165621A (ja) * 1974-12-04 1976-06-07 Process Shizai Gazokeiseiyozairyo
JPS5187971A (en) * 1975-01-29 1976-07-31 Ibm Denjiimushoshanyoru rejisutozo no keiseihoho
JPS5290269A (en) * 1976-01-23 1977-07-29 Nippon Telegr & Teleph Corp <Ntt> Forming method for fine resist patterns
JPS52146217A (en) * 1976-05-31 1977-12-05 Toshiba Corp Positive type radiation sensitive material

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0061689A1 (en) * 1981-03-27 1982-10-06 Hitachi, Ltd. Radiation sensitive polymer materials

Also Published As

Publication number Publication date
JPS571820B2 (enrdf_load_stackoverflow) 1982-01-13

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