JPS571820B2 - - Google Patents

Info

Publication number
JPS571820B2
JPS571820B2 JP8897878A JP8897878A JPS571820B2 JP S571820 B2 JPS571820 B2 JP S571820B2 JP 8897878 A JP8897878 A JP 8897878A JP 8897878 A JP8897878 A JP 8897878A JP S571820 B2 JPS571820 B2 JP S571820B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP8897878A
Other languages
Japanese (ja)
Other versions
JPS5517112A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8897878A priority Critical patent/JPS5517112A/ja
Publication of JPS5517112A publication Critical patent/JPS5517112A/ja
Publication of JPS571820B2 publication Critical patent/JPS571820B2/ja
Granted legal-status Critical Current

Links

JP8897878A 1978-07-21 1978-07-21 Positive type radiation sensitive composition Granted JPS5517112A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8897878A JPS5517112A (en) 1978-07-21 1978-07-21 Positive type radiation sensitive composition

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8897878A JPS5517112A (en) 1978-07-21 1978-07-21 Positive type radiation sensitive composition

Publications (2)

Publication Number Publication Date
JPS5517112A JPS5517112A (en) 1980-02-06
JPS571820B2 true JPS571820B2 (enrdf_load_stackoverflow) 1982-01-13

Family

ID=13957880

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8897878A Granted JPS5517112A (en) 1978-07-21 1978-07-21 Positive type radiation sensitive composition

Country Status (1)

Country Link
JP (1) JPS5517112A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS632784U (enrdf_load_stackoverflow) * 1986-06-20 1988-01-09

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0061689B1 (en) * 1981-03-27 1986-08-27 Hitachi, Ltd. Radiation sensitive polymer materials

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5914733B2 (ja) * 1974-12-04 1984-04-05 プロセス資材 （株） 画像形成用材料
US4011351A (en) * 1975-01-29 1977-03-08 International Business Machines Corporation Preparation of resist image with methacrylate polymers
JPS5290269A (en) * 1976-01-23 1977-07-29 Nippon Telegr & Teleph Corp <Ntt> Forming method for fine resist patterns
JPS52146217A (en) * 1976-05-31 1977-12-05 Toshiba Corp Positive type radiation sensitive material

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS632784U (enrdf_load_stackoverflow) * 1986-06-20 1988-01-09

Also Published As

Publication number Publication date
JPS5517112A (en) 1980-02-06

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