JPS55166907A - Fan shaped magnetic field device - Google Patents

Fan shaped magnetic field device

Info

Publication number
JPS55166907A
JPS55166907A JP7542079A JP7542079A JPS55166907A JP S55166907 A JPS55166907 A JP S55166907A JP 7542079 A JP7542079 A JP 7542079A JP 7542079 A JP7542079 A JP 7542079A JP S55166907 A JPS55166907 A JP S55166907A
Authority
JP
Japan
Prior art keywords
fan shaped
shaped magnetic
field device
magnetic field
movable
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7542079A
Other languages
Japanese (ja)
Other versions
JPH023264B2 (en
Inventor
Toshimichi Taya
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP7542079A priority Critical patent/JPS55166907A/en
Publication of JPS55166907A publication Critical patent/JPS55166907A/en
Publication of JPH023264B2 publication Critical patent/JPH023264B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F7/00—Magnets
    • H01F7/06—Electromagnets; Actuators including electromagnets

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Electron Tubes For Measurement (AREA)

Abstract

PURPOSE:To attempt the improvement of performance and the reduction of cost of a fan shaped magnetic field device by a method wherein movable magnetic pole pieces are fitted up being movable slightly to the side end faces of fan shaped magnetic poles and an analyzing plate having a specified structure is established between the confronting faces. CONSTITUTION:Fan shaped magnetic poles 11a, 11b are arranged between the both end faces of a yoke 7, and an analyzing plate 14 is established putting packings 13a, 13b between them to constitute a fan shaped magnetic field device. An ion beam 3 passes through the analyzing plate 14. Triangular movable magnetic pole pieces 12a-12d are fitted up to the both ends of the fan shaped poles 11a, 11b by dovetail grooves, thier slanting surfaces are prepared diagonally against the ion beam 3 and the solid focusing action is regulated to elevate the transmission of ion. The packing 13 is formed in a ring shape with a nonmagnetic material. By this constitution, the ion beam passes through the whole area of gap of the fan shaped magnetic poles, the transmission of ion is elevated, the analyzable range is enlarged and a large- sized slightly movable mechanism is made to be unnecessary to enable the reduction of cost.
JP7542079A 1979-06-14 1979-06-14 Fan shaped magnetic field device Granted JPS55166907A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7542079A JPS55166907A (en) 1979-06-14 1979-06-14 Fan shaped magnetic field device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7542079A JPS55166907A (en) 1979-06-14 1979-06-14 Fan shaped magnetic field device

Publications (2)

Publication Number Publication Date
JPS55166907A true JPS55166907A (en) 1980-12-26
JPH023264B2 JPH023264B2 (en) 1990-01-23

Family

ID=13575672

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7542079A Granted JPS55166907A (en) 1979-06-14 1979-06-14 Fan shaped magnetic field device

Country Status (1)

Country Link
JP (1) JPS55166907A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62272437A (en) * 1986-05-21 1987-11-26 Mitsubishi Electric Corp Mass spectrometer for ion implanting apparatus
JP2012243767A (en) * 2011-05-19 2012-12-10 Fei Co Method and structure for controlling magnetic field distribution of e×b wien filter

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4936034U (en) * 1972-07-10 1974-03-30
JPS5029980U (en) * 1973-07-18 1975-04-04

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4936034U (en) * 1972-07-10 1974-03-30
JPS5029980U (en) * 1973-07-18 1975-04-04

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62272437A (en) * 1986-05-21 1987-11-26 Mitsubishi Electric Corp Mass spectrometer for ion implanting apparatus
JP2012243767A (en) * 2011-05-19 2012-12-10 Fei Co Method and structure for controlling magnetic field distribution of e×b wien filter
EP2525384A3 (en) * 2011-05-19 2013-08-28 FEI Company Method and structure for controlling magnetic field distributions in an ExB wien filter
US8835866B2 (en) 2011-05-19 2014-09-16 Fei Company Method and structure for controlling magnetic field distributions in an ExB Wien filter

Also Published As

Publication number Publication date
JPH023264B2 (en) 1990-01-23

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