JPS55160841A - Semiconductor detector - Google Patents
Semiconductor detectorInfo
- Publication number
- JPS55160841A JPS55160841A JP6933379A JP6933379A JPS55160841A JP S55160841 A JPS55160841 A JP S55160841A JP 6933379 A JP6933379 A JP 6933379A JP 6933379 A JP6933379 A JP 6933379A JP S55160841 A JPS55160841 A JP S55160841A
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- ultrafine particle
- particle film
- junction element
- circuit formed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
Abstract
PURPOSE: To miniaturize the device and to improve the sensitivity by holding a semiconductor substrate, on which a MOS FET made of ultrafine particle film and a circuit formed by a pn-junction element are adjacent to each other, in the air.
CONSTITUTION: The Si substrate 12, in which a gas detecting part of the MOS FET that is provided with an ultrafine particle film of a metal such as Pd or the like and oxides of Sn, Ti and Ni and a temperature detecting part of the circuit formed by the pn-junction element are adjacent to each other in the part corresponding to the gate, is attached to the posts 17' with the wire 18. In this way, when a reducing gas comes in contact with the ultrafine particle film on the Si substrate 12, current is changed, the concentration of the reducing gas can be detected by sensing the change of current, and temperature of the Si substrate 12 is kept constant by feeding an output of the circuit formed by the pn-junction element back to the control circuit.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6933379A JPS55160841A (en) | 1979-06-01 | 1979-06-01 | Semiconductor detector |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6933379A JPS55160841A (en) | 1979-06-01 | 1979-06-01 | Semiconductor detector |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS55160841A true JPS55160841A (en) | 1980-12-15 |
Family
ID=13399510
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6933379A Pending JPS55160841A (en) | 1979-06-01 | 1979-06-01 | Semiconductor detector |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS55160841A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4931851A (en) * | 1986-03-12 | 1990-06-05 | Thorn Emi Plc | Gas sensitive device |
-
1979
- 1979-06-01 JP JP6933379A patent/JPS55160841A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4931851A (en) * | 1986-03-12 | 1990-06-05 | Thorn Emi Plc | Gas sensitive device |
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