JPS55159147A - Production of sensor - Google Patents

Production of sensor

Info

Publication number
JPS55159147A
JPS55159147A JP6813879A JP6813879A JPS55159147A JP S55159147 A JPS55159147 A JP S55159147A JP 6813879 A JP6813879 A JP 6813879A JP 6813879 A JP6813879 A JP 6813879A JP S55159147 A JPS55159147 A JP S55159147A
Authority
JP
Japan
Prior art keywords
oxide
gas
substrate
letting
alcohol
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6813879A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6133376B2 (enrdf_load_stackoverflow
Inventor
Kuni Ogawa
Atsushi Abe
Masahiro Nishikawa
Satoshi Sekido
Shigeru Hayakawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP6813879A priority Critical patent/JPS55159147A/ja
Publication of JPS55159147A publication Critical patent/JPS55159147A/ja
Publication of JPS6133376B2 publication Critical patent/JPS6133376B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Non-Adjustable Resistors (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
JP6813879A 1979-05-30 1979-05-30 Production of sensor Granted JPS55159147A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6813879A JPS55159147A (en) 1979-05-30 1979-05-30 Production of sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6813879A JPS55159147A (en) 1979-05-30 1979-05-30 Production of sensor

Publications (2)

Publication Number Publication Date
JPS55159147A true JPS55159147A (en) 1980-12-11
JPS6133376B2 JPS6133376B2 (enrdf_load_stackoverflow) 1986-08-01

Family

ID=13365077

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6813879A Granted JPS55159147A (en) 1979-05-30 1979-05-30 Production of sensor

Country Status (1)

Country Link
JP (1) JPS55159147A (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61151014A (ja) * 1984-12-24 1986-07-09 Ulvac Corp 金属炭化物超微粉末製造方法
JPH0667977U (ja) * 1993-02-26 1994-09-22 株式会社キッツ バルブ用アクチュエータ
KR100305660B1 (ko) * 1999-02-09 2001-09-26 김희용 이중이온빔법을 이용하여 ＣｕＯ를 첨가한 황화합물계 가스 센서

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61151014A (ja) * 1984-12-24 1986-07-09 Ulvac Corp 金属炭化物超微粉末製造方法
JPH0667977U (ja) * 1993-02-26 1994-09-22 株式会社キッツ バルブ用アクチュエータ
KR100305660B1 (ko) * 1999-02-09 2001-09-26 김희용 이중이온빔법을 이용하여 ＣｕＯ를 첨가한 황화합물계 가스 센서

Also Published As

Publication number Publication date
JPS6133376B2 (enrdf_load_stackoverflow) 1986-08-01

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