JPS55154537A - Method and apparatus for carrying molten metal - Google Patents

Method and apparatus for carrying molten metal

Info

Publication number
JPS55154537A
JPS55154537A JP6049579A JP6049579A JPS55154537A JP S55154537 A JPS55154537 A JP S55154537A JP 6049579 A JP6049579 A JP 6049579A JP 6049579 A JP6049579 A JP 6049579A JP S55154537 A JPS55154537 A JP S55154537A
Authority
JP
Japan
Prior art keywords
metal
container
molten
vacuum
chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6049579A
Other languages
Japanese (ja)
Other versions
JPS6137336B2 (en
Inventor
Yoshikiyo Nakagawa
Tetsuyoshi Wada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Heavy Industries Ltd
Original Assignee
Mitsubishi Heavy Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Heavy Industries Ltd filed Critical Mitsubishi Heavy Industries Ltd
Priority to JP6049579A priority Critical patent/JPS55154537A/en
Publication of JPS55154537A publication Critical patent/JPS55154537A/en
Publication of JPS6137336B2 publication Critical patent/JPS6137336B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/246—Replenishment of source material

Abstract

PURPOSE:To prevent molten metal from splashing and oxide from being formed in a vacuum treating chamber, in plating by vacuum deposition or separation of molten alloy in a vacuum by evaporation, by feeding the molten metal into the chamber after removing gas contained in the metal at the atmosphere side. CONSTITUTION:Container 1 is partitioned into the first container 3 and the second container 4 by partition wall 2, containers 3, 4 are connected with connecting pipes 13, 14 provided with vacuum degassing chamber 11, and plating metal 5, 6 such as molten Zn is housed in containers 3, 4. Molten Zn is sucked into chamber 11 owing to a pressure difference to release gas contained, and it enters container 4 through pipe 14. The surfaces of undegassed molten metal 5 and degassed molten metal 6 are covered with molten B2O3 7, 8 to prevent contact to air. By making the head of metal 6 lower than the head of metal 5, metal 5 is automatically shifted from container 3 to container 4. Metal 6 is then sucked into container 17 in vacuum chamber 15 through connecting pipe 18. Since metal 6 has been degassed, it becomes metal vapor particles 19 without splashing and oxidizing, and particles 19 are vacuum deposited on the surface of substrate 20.
JP6049579A 1979-05-18 1979-05-18 Method and apparatus for carrying molten metal Granted JPS55154537A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6049579A JPS55154537A (en) 1979-05-18 1979-05-18 Method and apparatus for carrying molten metal

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6049579A JPS55154537A (en) 1979-05-18 1979-05-18 Method and apparatus for carrying molten metal

Publications (2)

Publication Number Publication Date
JPS55154537A true JPS55154537A (en) 1980-12-02
JPS6137336B2 JPS6137336B2 (en) 1986-08-23

Family

ID=13143926

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6049579A Granted JPS55154537A (en) 1979-05-18 1979-05-18 Method and apparatus for carrying molten metal

Country Status (1)

Country Link
JP (1) JPS55154537A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1357200A1 (en) * 2002-04-25 2003-10-29 Eastman Kodak Company Thermal PVD apparatus with detachable vapor source(s)
WO2014098489A1 (en) 2012-12-21 2014-06-26 주식회사 포스코 Heating apparatus, and coating device comprising same
WO2015093649A1 (en) 2013-12-19 2015-06-25 주식회사 포스코 Heating device and coating mechanism comprising same
JP2015519469A (en) * 2012-03-30 2015-07-09 タタ、スティール、ネダーランド、テクノロジー、ベスローテン、フェンノートシャップＴａｔａ Ｓｔｅｅｌ Ｎｅｄｅｒｌａｎｄ Ｔｅｃｈｎｏｌｏｇｙ Ｂｖ Method and apparatus for supplying liquid metal to an evaporator

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
LV13383B (en) * 2004-05-27 2006-02-20 Sidrabe As Method and device for vacuum vaporization metals or alloys
JP4747802B2 (en) * 2005-11-25 2011-08-17 大日本印刷株式会社 Vacuum film forming method and vacuum film forming apparatus

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1357200A1 (en) * 2002-04-25 2003-10-29 Eastman Kodak Company Thermal PVD apparatus with detachable vapor source(s)
JP2015519469A (en) * 2012-03-30 2015-07-09 タタ、スティール、ネダーランド、テクノロジー、ベスローテン、フェンノートシャップＴａｔａ Ｓｔｅｅｌ Ｎｅｄｅｒｌａｎｄ Ｔｅｃｈｎｏｌｏｇｙ Ｂｖ Method and apparatus for supplying liquid metal to an evaporator
WO2014098489A1 (en) 2012-12-21 2014-06-26 주식회사 포스코 Heating apparatus, and coating device comprising same
US10196736B2 (en) 2012-12-21 2019-02-05 Posco Heating apparatus, and coating device comprising same
WO2015093649A1 (en) 2013-12-19 2015-06-25 주식회사 포스코 Heating device and coating mechanism comprising same

Also Published As

Publication number Publication date
JPS6137336B2 (en) 1986-08-23

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