JPS55148480A - Laser device - Google Patents
Laser deviceInfo
- Publication number
- JPS55148480A JPS55148480A JP5600679A JP5600679A JPS55148480A JP S55148480 A JPS55148480 A JP S55148480A JP 5600679 A JP5600679 A JP 5600679A JP 5600679 A JP5600679 A JP 5600679A JP S55148480 A JPS55148480 A JP S55148480A
- Authority
- JP
- Japan
- Prior art keywords
- laser
- circuit
- power supply
- modulated voltage
- output
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
- H01S3/102—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling the active medium, e.g. by controlling the processes or apparatus for excitation
- H01S3/104—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling the active medium, e.g. by controlling the processes or apparatus for excitation in gas lasers
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5600679A JPS55148480A (en) | 1979-05-08 | 1979-05-08 | Laser device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5600679A JPS55148480A (en) | 1979-05-08 | 1979-05-08 | Laser device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS55148480A true JPS55148480A (en) | 1980-11-19 |
Family
ID=13014960
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP5600679A Pending JPS55148480A (en) | 1979-05-08 | 1979-05-08 | Laser device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS55148480A (ja) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0065699A2 (en) * | 1981-05-11 | 1982-12-01 | Mitsubishi Denki Kabushiki Kaisha | A silent discharge-type laser device |
WO1988007274A1 (en) * | 1987-03-20 | 1988-09-22 | Fanuc Ltd | Laser oscillator control circuit |
WO2014187619A1 (en) * | 2013-05-20 | 2014-11-27 | Asml Netherlands B.V. | Method of controlling a radiation source and lithographic apparatus comprising the radiation source |
-
1979
- 1979-05-08 JP JP5600679A patent/JPS55148480A/ja active Pending
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0065699A2 (en) * | 1981-05-11 | 1982-12-01 | Mitsubishi Denki Kabushiki Kaisha | A silent discharge-type laser device |
WO1988007274A1 (en) * | 1987-03-20 | 1988-09-22 | Fanuc Ltd | Laser oscillator control circuit |
WO2014187619A1 (en) * | 2013-05-20 | 2014-11-27 | Asml Netherlands B.V. | Method of controlling a radiation source and lithographic apparatus comprising the radiation source |
US9645510B2 (en) | 2013-05-20 | 2017-05-09 | Asml Netherlands B.V. | Method of controlling a radiation source and lithographic apparatus comprising the radiation source |
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