JPS55148337A - Composite type lab6 cathode for plasma generation - Google Patents

Composite type lab6 cathode for plasma generation

Info

Publication number
JPS55148337A
JPS55148337A JP5739579A JP5739579A JPS55148337A JP S55148337 A JPS55148337 A JP S55148337A JP 5739579 A JP5739579 A JP 5739579A JP 5739579 A JP5739579 A JP 5739579A JP S55148337 A JPS55148337 A JP S55148337A
Authority
JP
Japan
Prior art keywords
discharge
cathode
lab6
auxiliary
main cathode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5739579A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0250577B2 (enrdf_load_stackoverflow
Inventor
Joshin Uramoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to JP5739579A priority Critical patent/JPS55148337A/ja
Publication of JPS55148337A publication Critical patent/JPS55148337A/ja
Publication of JPH0250577B2 publication Critical patent/JPH0250577B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
    • H01J1/02—Main electrodes
    • H01J1/13—Solid thermionic cathodes

Landscapes

  • Solid Thermionic Cathode (AREA)
JP5739579A 1979-05-10 1979-05-10 Composite type lab6 cathode for plasma generation Granted JPS55148337A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5739579A JPS55148337A (en) 1979-05-10 1979-05-10 Composite type lab6 cathode for plasma generation

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5739579A JPS55148337A (en) 1979-05-10 1979-05-10 Composite type lab6 cathode for plasma generation

Publications (2)

Publication Number Publication Date
JPS55148337A true JPS55148337A (en) 1980-11-18
JPH0250577B2 JPH0250577B2 (enrdf_load_stackoverflow) 1990-11-02

Family

ID=13054429

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5739579A Granted JPS55148337A (en) 1979-05-10 1979-05-10 Composite type lab6 cathode for plasma generation

Country Status (1)

Country Link
JP (1) JPS55148337A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63102320A (ja) * 1986-10-20 1988-05-07 Tokyo Electron Ltd プラズマ生成装置

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4627365B2 (ja) * 2000-11-17 2011-02-09 中外炉工業株式会社 圧力勾配型プラズマ発生装置の始動方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5242591A (en) * 1975-10-01 1977-04-02 Nippon Zeon Co Ltd Process for preparing acrylonitrile polymers

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5242591A (en) * 1975-10-01 1977-04-02 Nippon Zeon Co Ltd Process for preparing acrylonitrile polymers

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63102320A (ja) * 1986-10-20 1988-05-07 Tokyo Electron Ltd プラズマ生成装置

Also Published As

Publication number Publication date
JPH0250577B2 (enrdf_load_stackoverflow) 1990-11-02

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