JPS55131636A - Air shower device with clean-air feeder - Google Patents

Air shower device with clean-air feeder

Info

Publication number
JPS55131636A
JPS55131636A JP3687879A JP3687879A JPS55131636A JP S55131636 A JPS55131636 A JP S55131636A JP 3687879 A JP3687879 A JP 3687879A JP 3687879 A JP3687879 A JP 3687879A JP S55131636 A JPS55131636 A JP S55131636A
Authority
JP
Japan
Prior art keywords
air
shower
chamber
clean
blower
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3687879A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61529B2 (enExample
Inventor
Satoshi Nakano
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP3687879A priority Critical patent/JPS55131636A/ja
Publication of JPS55131636A publication Critical patent/JPS55131636A/ja
Publication of JPS61529B2 publication Critical patent/JPS61529B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Ventilation (AREA)
JP3687879A 1979-03-30 1979-03-30 Air shower device with clean-air feeder Granted JPS55131636A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3687879A JPS55131636A (en) 1979-03-30 1979-03-30 Air shower device with clean-air feeder

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3687879A JPS55131636A (en) 1979-03-30 1979-03-30 Air shower device with clean-air feeder

Publications (2)

Publication Number Publication Date
JPS55131636A true JPS55131636A (en) 1980-10-13
JPS61529B2 JPS61529B2 (enExample) 1986-01-09

Family

ID=12482032

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3687879A Granted JPS55131636A (en) 1979-03-30 1979-03-30 Air shower device with clean-air feeder

Country Status (1)

Country Link
JP (1) JPS55131636A (enExample)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57139132U (enExample) * 1981-02-23 1982-08-31
US4967645A (en) * 1989-11-27 1990-11-06 Micron Technology, Inc. Air shower with directed air flow
JP2003097835A (ja) * 2001-09-25 2003-04-03 Shimizu Corp 移動式クリーンルーム
JP2021025691A (ja) * 2019-08-02 2021-02-22 三宝電機株式会社 エアシャワー装置

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01122054A (ja) * 1987-11-05 1989-05-15 Canon Inc 磁気記録再生装置
JPH01269266A (ja) * 1988-04-21 1989-10-26 Hitachi Ltd 磁気記録再生装置
KR930001101B1 (ko) * 1989-10-13 1993-02-15 삼성전자 주식회사 테이프 레코더의 릴디스크 회전속도 변환장치

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57139132U (enExample) * 1981-02-23 1982-08-31
US4967645A (en) * 1989-11-27 1990-11-06 Micron Technology, Inc. Air shower with directed air flow
JP2003097835A (ja) * 2001-09-25 2003-04-03 Shimizu Corp 移動式クリーンルーム
JP2021025691A (ja) * 2019-08-02 2021-02-22 三宝電機株式会社 エアシャワー装置

Also Published As

Publication number Publication date
JPS61529B2 (enExample) 1986-01-09

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