JPS55130142A - Fabricating method of semiconductor device - Google Patents
Fabricating method of semiconductor deviceInfo
- Publication number
- JPS55130142A JPS55130142A JP3822379A JP3822379A JPS55130142A JP S55130142 A JPS55130142 A JP S55130142A JP 3822379 A JP3822379 A JP 3822379A JP 3822379 A JP3822379 A JP 3822379A JP S55130142 A JPS55130142 A JP S55130142A
- Authority
- JP
- Japan
- Prior art keywords
- hole
- laser
- film
- semiconductor device
- vicinity
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Abstract
PURPOSE:To fabricate a semiconductor device in high reliability and yield by irradiating a laser light of long wavelength to the vicinity of an impurity containing glass film including contact hole to melt and soften the film and forming round edge of the contact hole. CONSTITUTION:A second PSG insulating film 4 is grown, then patterned, and formed with a through hole 4A thereat. A laser light of long wavelength such as CO2 laser is suitably focused and irradiated only to the vicinity of the through hole 4A. The light by the CO2 laser is absorbed by approx. 70% to a PSG, but almost reflected by 100% by aluminum. Therefore, the film 4 is molten and softened only at the periphery of the through hole 4A, and roundness is formed at the edge.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3822379A JPS55130142A (en) | 1979-03-30 | 1979-03-30 | Fabricating method of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3822379A JPS55130142A (en) | 1979-03-30 | 1979-03-30 | Fabricating method of semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS55130142A true JPS55130142A (en) | 1980-10-08 |
Family
ID=12519297
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3822379A Pending JPS55130142A (en) | 1979-03-30 | 1979-03-30 | Fabricating method of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS55130142A (en) |
-
1979
- 1979-03-30 JP JP3822379A patent/JPS55130142A/en active Pending
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