JPS55122870A - Vacuum vapor deposition method - Google Patents

Vacuum vapor deposition method

Info

Publication number
JPS55122870A
JPS55122870A JP2855579A JP2855579A JPS55122870A JP S55122870 A JPS55122870 A JP S55122870A JP 2855579 A JP2855579 A JP 2855579A JP 2855579 A JP2855579 A JP 2855579A JP S55122870 A JPS55122870 A JP S55122870A
Authority
JP
Japan
Prior art keywords
crucible
temperature
vapor deposition
liquid
shutter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2855579A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6130028B2 (enExample
Inventor
Shuji Tabuchi
Akira Abiru
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP2855579A priority Critical patent/JPS55122870A/ja
Publication of JPS55122870A publication Critical patent/JPS55122870A/ja
Publication of JPS6130028B2 publication Critical patent/JPS6130028B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/54—Controlling or regulating the coating process
    • C23C14/542—Controlling the film thickness or evaporation rate
    • C23C14/543—Controlling the film thickness or evaporation rate using measurement on the vapor source

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Electrodes Of Semiconductors (AREA)
JP2855579A 1979-03-12 1979-03-12 Vacuum vapor deposition method Granted JPS55122870A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2855579A JPS55122870A (en) 1979-03-12 1979-03-12 Vacuum vapor deposition method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2855579A JPS55122870A (en) 1979-03-12 1979-03-12 Vacuum vapor deposition method

Publications (2)

Publication Number Publication Date
JPS55122870A true JPS55122870A (en) 1980-09-20
JPS6130028B2 JPS6130028B2 (enExample) 1986-07-10

Family

ID=12251890

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2855579A Granted JPS55122870A (en) 1979-03-12 1979-03-12 Vacuum vapor deposition method

Country Status (1)

Country Link
JP (1) JPS55122870A (enExample)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63259835A (ja) * 1987-04-17 1988-10-26 Fuji Photo Film Co Ltd 磁気記録媒体の製造装置
JPS63259833A (ja) * 1987-04-17 1988-10-26 Fuji Photo Film Co Ltd 磁気記録媒体の製造装置
JP2007023319A (ja) * 2005-07-13 2007-02-01 Sumitomo Electric Ind Ltd 真空蒸着装置および真空蒸着装置の運転方法
JP2011052301A (ja) * 2009-09-04 2011-03-17 Hitachi Zosen Corp 真空蒸着用蒸着材料の蒸発、昇華方法および真空蒸着用るつぼ装置
US8020314B2 (en) * 2008-10-31 2011-09-20 Corning Incorporated Methods and apparatus for drying ceramic green bodies with microwaves
US8075693B2 (en) 2007-08-23 2011-12-13 Samsung Mobile Display Co., Ltd. Crucible heating apparatus and deposition apparatus including the same

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0418902U (enExample) * 1990-06-06 1992-02-18

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5347382A (en) * 1976-10-13 1978-04-27 Citizen Watch Co Ltd Shutter mechanism for evaporation source of vacuum evaporation apparatus

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5347382A (en) * 1976-10-13 1978-04-27 Citizen Watch Co Ltd Shutter mechanism for evaporation source of vacuum evaporation apparatus

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63259835A (ja) * 1987-04-17 1988-10-26 Fuji Photo Film Co Ltd 磁気記録媒体の製造装置
JPS63259833A (ja) * 1987-04-17 1988-10-26 Fuji Photo Film Co Ltd 磁気記録媒体の製造装置
JP2007023319A (ja) * 2005-07-13 2007-02-01 Sumitomo Electric Ind Ltd 真空蒸着装置および真空蒸着装置の運転方法
US8075693B2 (en) 2007-08-23 2011-12-13 Samsung Mobile Display Co., Ltd. Crucible heating apparatus and deposition apparatus including the same
US8020314B2 (en) * 2008-10-31 2011-09-20 Corning Incorporated Methods and apparatus for drying ceramic green bodies with microwaves
JP2011052301A (ja) * 2009-09-04 2011-03-17 Hitachi Zosen Corp 真空蒸着用蒸着材料の蒸発、昇華方法および真空蒸着用るつぼ装置

Also Published As

Publication number Publication date
JPS6130028B2 (enExample) 1986-07-10

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