JPS55122108A - Pattern inspection device - Google Patents
Pattern inspection deviceInfo
- Publication number
- JPS55122108A JPS55122108A JP2970679A JP2970679A JPS55122108A JP S55122108 A JPS55122108 A JP S55122108A JP 2970679 A JP2970679 A JP 2970679A JP 2970679 A JP2970679 A JP 2970679A JP S55122108 A JPS55122108 A JP S55122108A
- Authority
- JP
- Japan
- Prior art keywords
- pattern
- light
- counter
- scanning
- signal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Length Measuring Devices By Optical Means (AREA)
Abstract
PURPOSE: To inspect the pattern at high speed and to improve S/N of the detection signal by wrapping a printed substrate to be inspected around the rotary drum and by scanning it with a light beam continuously while turning the drum.
CONSTITUTION: The printed substrate 5 to be inspected is wrapped on the surface of the rotary drum D. And the pattern on the substrate 5 is scanned by two light beams L1, L2 from the optical lens 4, the counting operation of the counter 11 is started by a signal that is obtained by receiving a reflected ray from the pattern edge by means of the light detectors 7, 8, the operation of the counter 11 is stopped by a signal from the light detector 8 after a fixed time, the width of the conductive layer is measured from both the count value of the counter 11 and the light scanning speed to inspect the pattern. In this way, the pattern inspection can be speed up by performing the light beam scanning continuously.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2970679A JPS55122108A (en) | 1979-03-14 | 1979-03-14 | Pattern inspection device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2970679A JPS55122108A (en) | 1979-03-14 | 1979-03-14 | Pattern inspection device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS55122108A true JPS55122108A (en) | 1980-09-19 |
Family
ID=12283544
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2970679A Pending JPS55122108A (en) | 1979-03-14 | 1979-03-14 | Pattern inspection device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS55122108A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109443239A (en) * | 2018-12-03 | 2019-03-08 | 广州欧科信息技术股份有限公司 | Structural light measurement method, apparatus, equipment, storage medium and system |
-
1979
- 1979-03-14 JP JP2970679A patent/JPS55122108A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109443239A (en) * | 2018-12-03 | 2019-03-08 | 广州欧科信息技术股份有限公司 | Structural light measurement method, apparatus, equipment, storage medium and system |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JPS57131039A (en) | Defect detector | |
JPS56126747A (en) | Inspecting method for flaw, alien substance and the like on surface of sample and device therefor | |
JPS56103304A (en) | Electro optical inspecting device | |
JPS51122483A (en) | Scanner type inspection device | |
JPS56124003A (en) | Measuring device for pattern | |
JPS55122108A (en) | Pattern inspection device | |
JPS58204353A (en) | Method for detecting flaw on surface of metallic object | |
JPS5389794A (en) | Defect inspecting apparatus | |
JPS5355983A (en) | Automatic micro defect detector | |
JPS52138183A (en) | Inspecting apparatus for flaw | |
JPS55154402A (en) | Shape measuring apparatus | |
JPS57128834A (en) | Inspecting apparatus of foreign substance | |
US4077723A (en) | Method of measuring thickness | |
JPS55134339A (en) | Inspecting device of lens | |
JPS5582006A (en) | Measuring method for thickness | |
JPH0228815B2 (en) | ||
JPS54111881A (en) | Ultrasonic flaw detection method | |
JPS545750A (en) | Pattern inspecting method | |
JPS5518926A (en) | Flaw inspector for glass bottle drum | |
JPS5257843A (en) | Measuring device for thickness of film | |
JPS5728239A (en) | Inspection of defect on cylinder surface | |
JPS5527913A (en) | Bottle inspection apparatus | |
JPS58204351A (en) | Method for detecting flaw on surface of metallic object | |
JPS5560806A (en) | Inspecting method for pattern | |
JPS5639517A (en) | Position detecting method in optical scanning |