JPS55122108A - Pattern inspection device - Google Patents

Pattern inspection device

Info

Publication number
JPS55122108A
JPS55122108A JP2970679A JP2970679A JPS55122108A JP S55122108 A JPS55122108 A JP S55122108A JP 2970679 A JP2970679 A JP 2970679A JP 2970679 A JP2970679 A JP 2970679A JP S55122108 A JPS55122108 A JP S55122108A
Authority
JP
Japan
Prior art keywords
pattern
light
counter
scanning
signal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2970679A
Other languages
Japanese (ja)
Inventor
Moritoshi Ando
Yushi Inagaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP2970679A priority Critical patent/JPS55122108A/en
Publication of JPS55122108A publication Critical patent/JPS55122108A/en
Pending legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)

Abstract

PURPOSE: To inspect the pattern at high speed and to improve S/N of the detection signal by wrapping a printed substrate to be inspected around the rotary drum and by scanning it with a light beam continuously while turning the drum.
CONSTITUTION: The printed substrate 5 to be inspected is wrapped on the surface of the rotary drum D. And the pattern on the substrate 5 is scanned by two light beams L1, L2 from the optical lens 4, the counting operation of the counter 11 is started by a signal that is obtained by receiving a reflected ray from the pattern edge by means of the light detectors 7, 8, the operation of the counter 11 is stopped by a signal from the light detector 8 after a fixed time, the width of the conductive layer is measured from both the count value of the counter 11 and the light scanning speed to inspect the pattern. In this way, the pattern inspection can be speed up by performing the light beam scanning continuously.
COPYRIGHT: (C)1980,JPO&Japio
JP2970679A 1979-03-14 1979-03-14 Pattern inspection device Pending JPS55122108A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2970679A JPS55122108A (en) 1979-03-14 1979-03-14 Pattern inspection device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2970679A JPS55122108A (en) 1979-03-14 1979-03-14 Pattern inspection device

Publications (1)

Publication Number Publication Date
JPS55122108A true JPS55122108A (en) 1980-09-19

Family

ID=12283544

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2970679A Pending JPS55122108A (en) 1979-03-14 1979-03-14 Pattern inspection device

Country Status (1)

Country Link
JP (1) JPS55122108A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109443239A (en) * 2018-12-03 2019-03-08 广州欧科信息技术股份有限公司 Structural light measurement method, apparatus, equipment, storage medium and system

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109443239A (en) * 2018-12-03 2019-03-08 广州欧科信息技术股份有限公司 Structural light measurement method, apparatus, equipment, storage medium and system

Similar Documents

Publication Publication Date Title
JPS57131039A (en) Defect detector
JPS56126747A (en) Inspecting method for flaw, alien substance and the like on surface of sample and device therefor
JPS56103304A (en) Electro optical inspecting device
JPS51122483A (en) Scanner type inspection device
JPS56124003A (en) Measuring device for pattern
JPS55122108A (en) Pattern inspection device
JPS58204353A (en) Method for detecting flaw on surface of metallic object
JPS5389794A (en) Defect inspecting apparatus
JPS5355983A (en) Automatic micro defect detector
JPS52138183A (en) Inspecting apparatus for flaw
JPS55154402A (en) Shape measuring apparatus
JPS57128834A (en) Inspecting apparatus of foreign substance
US4077723A (en) Method of measuring thickness
JPS55134339A (en) Inspecting device of lens
JPS5582006A (en) Measuring method for thickness
JPH0228815B2 (en)
JPS54111881A (en) Ultrasonic flaw detection method
JPS545750A (en) Pattern inspecting method
JPS5518926A (en) Flaw inspector for glass bottle drum
JPS5257843A (en) Measuring device for thickness of film
JPS5728239A (en) Inspection of defect on cylinder surface
JPS5527913A (en) Bottle inspection apparatus
JPS58204351A (en) Method for detecting flaw on surface of metallic object
JPS5560806A (en) Inspecting method for pattern
JPS5639517A (en) Position detecting method in optical scanning