JPS55115251A - Ion micro analyzer - Google Patents

Ion micro analyzer

Info

Publication number
JPS55115251A
JPS55115251A JP2194479A JP2194479A JPS55115251A JP S55115251 A JPS55115251 A JP S55115251A JP 2194479 A JP2194479 A JP 2194479A JP 2194479 A JP2194479 A JP 2194479A JP S55115251 A JPS55115251 A JP S55115251A
Authority
JP
Japan
Prior art keywords
sample
electrode
variation
kept
holder
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2194479A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6158941B2 (https=
Inventor
Eiichi Izumi
Mitsuo Fujiwara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP2194479A priority Critical patent/JPS55115251A/ja
Publication of JPS55115251A publication Critical patent/JPS55115251A/ja
Publication of JPS6158941B2 publication Critical patent/JPS6158941B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Analysing Materials By The Use Of Radiation (AREA)
JP2194479A 1979-02-28 1979-02-28 Ion micro analyzer Granted JPS55115251A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2194479A JPS55115251A (en) 1979-02-28 1979-02-28 Ion micro analyzer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2194479A JPS55115251A (en) 1979-02-28 1979-02-28 Ion micro analyzer

Publications (2)

Publication Number Publication Date
JPS55115251A true JPS55115251A (en) 1980-09-05
JPS6158941B2 JPS6158941B2 (https=) 1986-12-13

Family

ID=12069152

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2194479A Granted JPS55115251A (en) 1979-02-28 1979-02-28 Ion micro analyzer

Country Status (1)

Country Link
JP (1) JPS55115251A (https=)

Also Published As

Publication number Publication date
JPS6158941B2 (https=) 1986-12-13

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