JPS55115251A - Ion micro analyzer - Google Patents
Ion micro analyzerInfo
- Publication number
- JPS55115251A JPS55115251A JP2194479A JP2194479A JPS55115251A JP S55115251 A JPS55115251 A JP S55115251A JP 2194479 A JP2194479 A JP 2194479A JP 2194479 A JP2194479 A JP 2194479A JP S55115251 A JPS55115251 A JP S55115251A
- Authority
- JP
- Japan
- Prior art keywords
- sample
- electrode
- variation
- kept
- holder
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Analysing Materials By The Use Of Radiation (AREA)
Abstract
PURPOSE: To minimize the variation in secondary ion drawing efficiency with the position of sample by arranging a conductive auxiliary electrode between a sample holder and auxiliary electrode.
CONSTITUTION: The correcting electrode 7 is attached to a place in line with the place where the sample 3 is attached of a sample holder and then kept at the potential of sample. Even under the condition that the samle holder 4 is kept farthest away from the drawing electrode, the space between the sample holder 4 and the drawing electrode 5 can be kept at the potential of sample. Thus, the variation in the electric field between both electrodes can be eliminated and therefore the variation in the secondary ion drawing efficiency can be suppressed.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2194479A JPS55115251A (en) | 1979-02-28 | 1979-02-28 | Ion micro analyzer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2194479A JPS55115251A (en) | 1979-02-28 | 1979-02-28 | Ion micro analyzer |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS55115251A true JPS55115251A (en) | 1980-09-05 |
| JPS6158941B2 JPS6158941B2 (en) | 1986-12-13 |
Family
ID=12069152
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2194479A Granted JPS55115251A (en) | 1979-02-28 | 1979-02-28 | Ion micro analyzer |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS55115251A (en) |
-
1979
- 1979-02-28 JP JP2194479A patent/JPS55115251A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6158941B2 (en) | 1986-12-13 |
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