JPS53120098A - Ion generator - Google Patents

Ion generator

Info

Publication number
JPS53120098A
JPS53120098A JP3448377A JP3448377A JPS53120098A JP S53120098 A JPS53120098 A JP S53120098A JP 3448377 A JP3448377 A JP 3448377A JP 3448377 A JP3448377 A JP 3448377A JP S53120098 A JPS53120098 A JP S53120098A
Authority
JP
Japan
Prior art keywords
electrode
accelerating
ion generator
fix
support
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3448377A
Other languages
Japanese (ja)
Inventor
Tetsuo Okabe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP3448377A priority Critical patent/JPS53120098A/en
Publication of JPS53120098A publication Critical patent/JPS53120098A/en
Pending legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)

Abstract

PURPOSE: To enable the measurement with good ratio of SN, by means of eliminating the leakage of high voltage for accelerating to a detecting electrode by allowing glass supporters which support and fix an accelerating electrode and an earthing electrode and glass supporters which support and fix an accelerating electrode and a detecting electrode to be independently separated.
COPYRIGHT: (C)1978,JPO&Japio
JP3448377A 1977-03-30 1977-03-30 Ion generator Pending JPS53120098A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3448377A JPS53120098A (en) 1977-03-30 1977-03-30 Ion generator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3448377A JPS53120098A (en) 1977-03-30 1977-03-30 Ion generator

Publications (1)

Publication Number Publication Date
JPS53120098A true JPS53120098A (en) 1978-10-20

Family

ID=12415486

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3448377A Pending JPS53120098A (en) 1977-03-30 1977-03-30 Ion generator

Country Status (1)

Country Link
JP (1) JPS53120098A (en)

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