JPS5511179A - Composite member and its preparation - Google Patents

Composite member and its preparation

Info

Publication number
JPS5511179A
JPS5511179A JP8445278A JP8445278A JPS5511179A JP S5511179 A JPS5511179 A JP S5511179A JP 8445278 A JP8445278 A JP 8445278A JP 8445278 A JP8445278 A JP 8445278A JP S5511179 A JPS5511179 A JP S5511179A
Authority
JP
Japan
Prior art keywords
evaporation
layer
composite member
covering layer
end part
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8445278A
Other languages
Japanese (ja)
Other versions
JPS6035994B2 (en
Inventor
Tadayuki Shimizu
Tsunemori Yoshida
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Pillar Packing Co Ltd
Original Assignee
Nippon Pillar Packing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Pillar Packing Co Ltd filed Critical Nippon Pillar Packing Co Ltd
Priority to JP8445278A priority Critical patent/JPS6035994B2/en
Publication of JPS5511179A publication Critical patent/JPS5511179A/en
Publication of JPS6035994B2 publication Critical patent/JPS6035994B2/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/04—Coating on selected surface areas, e.g. using masks
    • C23C16/042—Coating on selected surface areas, e.g. using masks using masks

Abstract

PURPOSE:To obtain the composite member, such as sliding member etc. without forcing out evaporation covering layer to the other surface, by carrying out chemical evaporation providing tapered face at the end part of optional surface of basic material. CONSTITUTION:The other surface part 10 is surrounded by the masking member 8 so as the optional surface 9 forming evaporation covering layer to be exposed on the basic material 7, such as carbon etc. The evaporation covering layer 13, such as silicon carbide etc., is formed by chemical evaporation method, after forming the tapered face 11 on the end part composed of the surface 9 and neighboring the other surface 10. By the above method, obtained composite member 12 is formed flat along the surface 9 without swelling or forcing out the layer 13 to the surface 10. Especially, thickness of the layer 13 at the face 11 is changed uniformly and is formed in a straight line along the surface 10.
JP8445278A 1978-07-10 1978-07-10 Manufacturing method for composite parts Expired JPS6035994B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8445278A JPS6035994B2 (en) 1978-07-10 1978-07-10 Manufacturing method for composite parts

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8445278A JPS6035994B2 (en) 1978-07-10 1978-07-10 Manufacturing method for composite parts

Publications (2)

Publication Number Publication Date
JPS5511179A true JPS5511179A (en) 1980-01-25
JPS6035994B2 JPS6035994B2 (en) 1985-08-17

Family

ID=13831002

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8445278A Expired JPS6035994B2 (en) 1978-07-10 1978-07-10 Manufacturing method for composite parts

Country Status (1)

Country Link
JP (1) JPS6035994B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0416813A2 (en) * 1989-09-07 1991-03-13 Cvd Incorporated Method to prevent backside growth on substrates in a vapor deposition system
JP2000087239A (en) * 1998-05-05 2000-03-28 Cvd Inc Production of silicon carbide article erected without being supported and device therefor

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0416813A2 (en) * 1989-09-07 1991-03-13 Cvd Incorporated Method to prevent backside growth on substrates in a vapor deposition system
JP2000087239A (en) * 1998-05-05 2000-03-28 Cvd Inc Production of silicon carbide article erected without being supported and device therefor

Also Published As

Publication number Publication date
JPS6035994B2 (en) 1985-08-17

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