JPS55111663A - Switching device - Google Patents

Switching device

Info

Publication number
JPS55111663A
JPS55111663A JP1769779A JP1769779A JPS55111663A JP S55111663 A JPS55111663 A JP S55111663A JP 1769779 A JP1769779 A JP 1769779A JP 1769779 A JP1769779 A JP 1769779A JP S55111663 A JPS55111663 A JP S55111663A
Authority
JP
Japan
Prior art keywords
electrode plate
voltage
well
deflected
switch
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1769779A
Other languages
English (en)
Inventor
Kunihiro Tanigawa
Hiroyuki Ishizaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP1769779A priority Critical patent/JPS55111663A/ja
Publication of JPS55111663A publication Critical patent/JPS55111663A/ja
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Dc-Dc Converters (AREA)
JP1769779A 1979-02-16 1979-02-16 Switching device Pending JPS55111663A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1769779A JPS55111663A (en) 1979-02-16 1979-02-16 Switching device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1769779A JPS55111663A (en) 1979-02-16 1979-02-16 Switching device

Publications (1)

Publication Number Publication Date
JPS55111663A true JPS55111663A (en) 1980-08-28

Family

ID=11950986

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1769779A Pending JPS55111663A (en) 1979-02-16 1979-02-16 Switching device

Country Status (1)

Country Link
JP (1) JPS55111663A (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1574475A3 (en) * 2004-03-11 2007-03-21 Palo Alto Research Center Incorporated Integrated driver electronics for MEMS device using high voltage thin film transistors

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1574475A3 (en) * 2004-03-11 2007-03-21 Palo Alto Research Center Incorporated Integrated driver electronics for MEMS device using high voltage thin film transistors

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