JPS55109015A - Manufacture of lithium tantalate piezoelectric oscillator - Google Patents

Manufacture of lithium tantalate piezoelectric oscillator

Info

Publication number
JPS55109015A
JPS55109015A JP1541979A JP1541979A JPS55109015A JP S55109015 A JPS55109015 A JP S55109015A JP 1541979 A JP1541979 A JP 1541979A JP 1541979 A JP1541979 A JP 1541979A JP S55109015 A JPS55109015 A JP S55109015A
Authority
JP
Japan
Prior art keywords
base plate
etching
lithium tantalate
size
abrasive grain
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1541979A
Other languages
Japanese (ja)
Inventor
Masaaki Ono
Hideki Tominaga
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP1541979A priority Critical patent/JPS55109015A/en
Publication of JPS55109015A publication Critical patent/JPS55109015A/en
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/02Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)

Abstract

PURPOSE:To eliminate the mechanical process distortion layer on the surface of the base plate by processing the lithium tantalate into the flat board type base plate and then giving etching process to the both surfaces of the base plate after the lapping process. CONSTITUTION:The etching is given to both surfaces of the lithium tantalate base plate featuring, for example, the thickness of 75.5mum and the resonance frequency of 27.28MHz each after the lapping process according to the sizes of the abrasive grain as #1200, #2000 and #4000 each. With the size of the abrasive grain used as the parameter, the curves are drawn with the etching amount and the resonance resistance set to the horizontal and vertical axes each. Thus the resonance resistance lowers down suddenly along with the progress of the etching in the case of size #4000. And the best product is obtained when the lapping is given with the size #4000 of the abrasive grain.
JP1541979A 1979-02-15 1979-02-15 Manufacture of lithium tantalate piezoelectric oscillator Pending JPS55109015A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1541979A JPS55109015A (en) 1979-02-15 1979-02-15 Manufacture of lithium tantalate piezoelectric oscillator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1541979A JPS55109015A (en) 1979-02-15 1979-02-15 Manufacture of lithium tantalate piezoelectric oscillator

Publications (1)

Publication Number Publication Date
JPS55109015A true JPS55109015A (en) 1980-08-21

Family

ID=11888231

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1541979A Pending JPS55109015A (en) 1979-02-15 1979-02-15 Manufacture of lithium tantalate piezoelectric oscillator

Country Status (1)

Country Link
JP (1) JPS55109015A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2021175165A (en) * 2020-04-30 2021-11-01 信越化学工業株式会社 Method for manufacturing composite substrate and composite substrate

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2021175165A (en) * 2020-04-30 2021-11-01 信越化学工業株式会社 Method for manufacturing composite substrate and composite substrate
WO2021220737A1 (en) * 2020-04-30 2021-11-04 信越化学工業株式会社 Method for manufacturing composite substrate and composite substrate

Similar Documents

Publication Publication Date Title
JPS5773501A (en) Dielectric filter element and dielectric filter
ES8306445A1 (en) Apparatus and method for the grinding of material.
JPS55109015A (en) Manufacture of lithium tantalate piezoelectric oscillator
GB1538146A (en) Process and apparatus for automatically adjusting the frequency of piezoelectric resonators in the form of bars or plates
JPS5411693A (en) Processig method for elastic surface wave substrate
JPS5453889A (en) Piezoelectric vibrator and its temperature characteristic adjusting method
JPS55120980A (en) Grinder for vertical-axis plane grinding
JPS5599814A (en) Manufacture for at cut crystal oscillation chip
JPS5232650A (en) Surface elastic wave element
JPS5518190A (en) Frequency adjustment method for high-coupled piezoelectric oscillator
JPS55107780A (en) Etching method
JPS5298495A (en) Manufacture of box-type crystal vibrator unit
JPS54137290A (en) Crystal oscillator
JPS5713802A (en) Elastic surface wave oscillator
JPS5537085A (en) Rectangular at-cut crystal oscillator
JPS5669914A (en) Frequency adjusting method for thickness sliding quartz oscillator
JPS5678219A (en) Elastic surface wave device
JPS5712626A (en) Production of wall plate
JPS5270752A (en) Manufacture of semiconductor device
JPS55155325A (en) Cracking method of liquid crystal multielement
JPS55143814A (en) Piezoelectric vibrator
SU835732A1 (en) Method of orienting grains in abrasive mass
JPS5291681A (en) Vibrator crystal plate and manufacture of it
JPS6451907A (en) Manufacture of cellular cement sheet
JPS5518191A (en) Frequency adjustment method for disk-shaped piezoelectric oscillator