JPS55109015A - Manufacture of lithium tantalate piezoelectric oscillator - Google Patents
Manufacture of lithium tantalate piezoelectric oscillatorInfo
- Publication number
- JPS55109015A JPS55109015A JP1541979A JP1541979A JPS55109015A JP S55109015 A JPS55109015 A JP S55109015A JP 1541979 A JP1541979 A JP 1541979A JP 1541979 A JP1541979 A JP 1541979A JP S55109015 A JPS55109015 A JP S55109015A
- Authority
- JP
- Japan
- Prior art keywords
- base plate
- etching
- lithium tantalate
- size
- abrasive grain
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- WSMQKESQZFQMFW-UHFFFAOYSA-N 5-methyl-pyrazole-3-carboxylic acid Chemical compound CC1=CC(C(O)=O)=NN1 WSMQKESQZFQMFW-UHFFFAOYSA-N 0.000 title abstract 3
- 238000004519 manufacturing process Methods 0.000 title 1
- 238000005530 etching Methods 0.000 abstract 4
- 239000006061 abrasive grain Substances 0.000 abstract 3
- 238000000034 method Methods 0.000 abstract 3
- 238000010297 mechanical methods and process Methods 0.000 abstract 1
- 230000005226 mechanical processes and functions Effects 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
- H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
- H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Abstract
PURPOSE:To eliminate the mechanical process distortion layer on the surface of the base plate by processing the lithium tantalate into the flat board type base plate and then giving etching process to the both surfaces of the base plate after the lapping process. CONSTITUTION:The etching is given to both surfaces of the lithium tantalate base plate featuring, for example, the thickness of 75.5mum and the resonance frequency of 27.28MHz each after the lapping process according to the sizes of the abrasive grain as #1200, #2000 and #4000 each. With the size of the abrasive grain used as the parameter, the curves are drawn with the etching amount and the resonance resistance set to the horizontal and vertical axes each. Thus the resonance resistance lowers down suddenly along with the progress of the etching in the case of size #4000. And the best product is obtained when the lapping is given with the size #4000 of the abrasive grain.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1541979A JPS55109015A (en) | 1979-02-15 | 1979-02-15 | Manufacture of lithium tantalate piezoelectric oscillator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1541979A JPS55109015A (en) | 1979-02-15 | 1979-02-15 | Manufacture of lithium tantalate piezoelectric oscillator |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS55109015A true JPS55109015A (en) | 1980-08-21 |
Family
ID=11888231
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1541979A Pending JPS55109015A (en) | 1979-02-15 | 1979-02-15 | Manufacture of lithium tantalate piezoelectric oscillator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS55109015A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2021175165A (en) * | 2020-04-30 | 2021-11-01 | 信越化学工業株式会社 | Method for manufacturing composite substrate and composite substrate |
-
1979
- 1979-02-15 JP JP1541979A patent/JPS55109015A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2021175165A (en) * | 2020-04-30 | 2021-11-01 | 信越化学工業株式会社 | Method for manufacturing composite substrate and composite substrate |
| WO2021220737A1 (en) * | 2020-04-30 | 2021-11-04 | 信越化学工業株式会社 | Method for manufacturing composite substrate and composite substrate |
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