JPS55108735A - Method for maintenance of electron beam exposure device - Google Patents

Method for maintenance of electron beam exposure device

Info

Publication number
JPS55108735A
JPS55108735A JP1559579A JP1559579A JPS55108735A JP S55108735 A JPS55108735 A JP S55108735A JP 1559579 A JP1559579 A JP 1559579A JP 1559579 A JP1559579 A JP 1559579A JP S55108735 A JPS55108735 A JP S55108735A
Authority
JP
Japan
Prior art keywords
cylinder
electron beam
small holes
magnetic metal
conducting film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1559579A
Other languages
Japanese (ja)
Inventor
Toshihiko Osada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP1559579A priority Critical patent/JPS55108735A/en
Publication of JPS55108735A publication Critical patent/JPS55108735A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/10—Lenses
    • H01J37/14—Lenses magnetic
    • H01J37/141—Electromagnetic lenses

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Beam Exposure (AREA)

Abstract

PURPOSE:To prevent an electically poor conducting film from being formed in a narrow space by covering the surface of a narrow space which is to become an electron beam path by non-magnetic metal foil. CONSTITUTION:The inner walls of small holes 11a and 11a' of pole pieces 11 and 11' made of pure iron are fitted with hollow cylinder 14, made of non-magnetic metal, such as aluminum foil, and having diameter smaller than those of small holes 11a and 11a'. Subsequently, the upper and lower ends are spread outside and these are covered by cylinder 14. As a result, an electrically poor conducting film produced by the decomposition of lubricant vapor by the electron beam does not directly stick to the inner walls of small holes 11a and 11a' but it is formed on the inner surface of cylinder 14. Consequently, at the cleaning time, the used cylinder 14 is taken out by means of tweezers and it is replaced by new cylinder 14.
JP1559579A 1979-02-13 1979-02-13 Method for maintenance of electron beam exposure device Pending JPS55108735A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1559579A JPS55108735A (en) 1979-02-13 1979-02-13 Method for maintenance of electron beam exposure device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1559579A JPS55108735A (en) 1979-02-13 1979-02-13 Method for maintenance of electron beam exposure device

Publications (1)

Publication Number Publication Date
JPS55108735A true JPS55108735A (en) 1980-08-21

Family

ID=11893064

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1559579A Pending JPS55108735A (en) 1979-02-13 1979-02-13 Method for maintenance of electron beam exposure device

Country Status (1)

Country Link
JP (1) JPS55108735A (en)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51110964A (en) * 1975-03-26 1976-09-30 Hitachi Ltd SOSAGATA DENSHIKENBIKYO

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51110964A (en) * 1975-03-26 1976-09-30 Hitachi Ltd SOSAGATA DENSHIKENBIKYO

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