JPS55108735A - Method for maintenance of electron beam exposure device - Google Patents
Method for maintenance of electron beam exposure deviceInfo
- Publication number
- JPS55108735A JPS55108735A JP1559579A JP1559579A JPS55108735A JP S55108735 A JPS55108735 A JP S55108735A JP 1559579 A JP1559579 A JP 1559579A JP 1559579 A JP1559579 A JP 1559579A JP S55108735 A JPS55108735 A JP S55108735A
- Authority
- JP
- Japan
- Prior art keywords
- cylinder
- electron beam
- small holes
- magnetic metal
- conducting film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
- H01J37/10—Lenses
- H01J37/14—Lenses magnetic
- H01J37/141—Electromagnetic lenses
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Electron Beam Exposure (AREA)
Abstract
PURPOSE:To prevent an electically poor conducting film from being formed in a narrow space by covering the surface of a narrow space which is to become an electron beam path by non-magnetic metal foil. CONSTITUTION:The inner walls of small holes 11a and 11a' of pole pieces 11 and 11' made of pure iron are fitted with hollow cylinder 14, made of non-magnetic metal, such as aluminum foil, and having diameter smaller than those of small holes 11a and 11a'. Subsequently, the upper and lower ends are spread outside and these are covered by cylinder 14. As a result, an electrically poor conducting film produced by the decomposition of lubricant vapor by the electron beam does not directly stick to the inner walls of small holes 11a and 11a' but it is formed on the inner surface of cylinder 14. Consequently, at the cleaning time, the used cylinder 14 is taken out by means of tweezers and it is replaced by new cylinder 14.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1559579A JPS55108735A (en) | 1979-02-13 | 1979-02-13 | Method for maintenance of electron beam exposure device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1559579A JPS55108735A (en) | 1979-02-13 | 1979-02-13 | Method for maintenance of electron beam exposure device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS55108735A true JPS55108735A (en) | 1980-08-21 |
Family
ID=11893064
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1559579A Pending JPS55108735A (en) | 1979-02-13 | 1979-02-13 | Method for maintenance of electron beam exposure device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS55108735A (en) |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS51110964A (en) * | 1975-03-26 | 1976-09-30 | Hitachi Ltd | SOSAGATA DENSHIKENBIKYO |
-
1979
- 1979-02-13 JP JP1559579A patent/JPS55108735A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS51110964A (en) * | 1975-03-26 | 1976-09-30 | Hitachi Ltd | SOSAGATA DENSHIKENBIKYO |
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