JPS55105350A - Semiconductor device - Google Patents
Semiconductor deviceInfo
- Publication number
- JPS55105350A JPS55105350A JP1295079A JP1295079A JPS55105350A JP S55105350 A JPS55105350 A JP S55105350A JP 1295079 A JP1295079 A JP 1295079A JP 1295079 A JP1295079 A JP 1295079A JP S55105350 A JPS55105350 A JP S55105350A
- Authority
- JP
- Japan
- Prior art keywords
- film
- periphery
- side walls
- sio
- region
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 title abstract 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 6
- 229910052681 coesite Inorganic materials 0.000 abstract 3
- 229910052906 cristobalite Inorganic materials 0.000 abstract 3
- 239000000377 silicon dioxide Substances 0.000 abstract 3
- 229910052682 stishovite Inorganic materials 0.000 abstract 3
- 239000000758 substrate Substances 0.000 abstract 3
- 229910052905 tridymite Inorganic materials 0.000 abstract 3
- 229910052581 Si3N4 Inorganic materials 0.000 abstract 2
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 abstract 1
- 230000003321 amplification Effects 0.000 abstract 1
- 230000006866 deterioration Effects 0.000 abstract 1
- 229910000040 hydrogen fluoride Inorganic materials 0.000 abstract 1
- 238000003199 nucleic acid amplification method Methods 0.000 abstract 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 abstract 1
Landscapes
- Local Oxidation Of Silicon (AREA)
- Bipolar Transistors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1295079A JPS55105350A (en) | 1979-02-07 | 1979-02-07 | Semiconductor device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1295079A JPS55105350A (en) | 1979-02-07 | 1979-02-07 | Semiconductor device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS55105350A true JPS55105350A (en) | 1980-08-12 |
| JPS6210027B2 JPS6210027B2 (enrdf_load_stackoverflow) | 1987-03-04 |
Family
ID=11819551
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1295079A Granted JPS55105350A (en) | 1979-02-07 | 1979-02-07 | Semiconductor device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS55105350A (enrdf_load_stackoverflow) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57104240A (en) * | 1980-12-22 | 1982-06-29 | Nec Corp | Semiconductor device |
| US4591760A (en) * | 1983-03-25 | 1986-05-27 | Matsushita Electronics Corporation | Cathode ray tube apparatus |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS51118392A (en) * | 1975-04-10 | 1976-10-18 | Matsushita Electric Ind Co Ltd | Manuforcturing process for semiconductor unit |
| JPS5218169A (en) * | 1975-08-01 | 1977-02-10 | Nec Corp | Production method of semiconductor |
-
1979
- 1979-02-07 JP JP1295079A patent/JPS55105350A/ja active Granted
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS51118392A (en) * | 1975-04-10 | 1976-10-18 | Matsushita Electric Ind Co Ltd | Manuforcturing process for semiconductor unit |
| JPS5218169A (en) * | 1975-08-01 | 1977-02-10 | Nec Corp | Production method of semiconductor |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57104240A (en) * | 1980-12-22 | 1982-06-29 | Nec Corp | Semiconductor device |
| US4591760A (en) * | 1983-03-25 | 1986-05-27 | Matsushita Electronics Corporation | Cathode ray tube apparatus |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6210027B2 (enrdf_load_stackoverflow) | 1987-03-04 |
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