JPS5499368A - Ultraviolet ray generator - Google Patents

Ultraviolet ray generator

Info

Publication number
JPS5499368A
JPS5499368A JP532378A JP532378A JPS5499368A JP S5499368 A JPS5499368 A JP S5499368A JP 532378 A JP532378 A JP 532378A JP 532378 A JP532378 A JP 532378A JP S5499368 A JPS5499368 A JP S5499368A
Authority
JP
Japan
Prior art keywords
ultraviolet ray
ray generator
generator
ultraviolet
ray
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP532378A
Other languages
English (en)
Inventor
Yoshio Yazaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
OKU SEISAKUSHO CO Ltd
Original Assignee
OKU SEISAKUSHO CO Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by OKU SEISAKUSHO CO Ltd filed Critical OKU SEISAKUSHO CO Ltd
Priority to JP532378A priority Critical patent/JPS5499368A/ja
Publication of JPS5499368A publication Critical patent/JPS5499368A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Circuit Arrangements For Discharge Lamps (AREA)
  • Discharge Lamps And Accessories Thereof (AREA)
JP532378A 1978-01-23 1978-01-23 Ultraviolet ray generator Pending JPS5499368A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP532378A JPS5499368A (en) 1978-01-23 1978-01-23 Ultraviolet ray generator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP532378A JPS5499368A (en) 1978-01-23 1978-01-23 Ultraviolet ray generator

Publications (1)

Publication Number Publication Date
JPS5499368A true JPS5499368A (en) 1979-08-06

Family

ID=11608032

Family Applications (1)

Application Number Title Priority Date Filing Date
JP532378A Pending JPS5499368A (en) 1978-01-23 1978-01-23 Ultraviolet ray generator

Country Status (1)

Country Link
JP (1) JPS5499368A (ja)

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56115846U (ja) * 1980-02-06 1981-09-05
JPS56141165A (en) * 1980-04-04 1981-11-04 Mitsubishi Electric Corp Nonelectrode electric discharge lamp
JPS57172649A (en) * 1981-04-17 1982-10-23 Mitsubishi Electric Corp Non-electrode electric-discharge lamp
JPS57172650A (en) * 1981-04-17 1982-10-23 Mitsubishi Electric Corp Non-electrode electric-discharge lamp
JPS57170267U (ja) * 1981-04-22 1982-10-26
JPS58196023A (ja) * 1982-03-29 1983-11-15 フユ−ジヨン・システムズ・コ−ポレ−シヨン 深紫外線フオトリトグラフイ−を達成する方法及び装置
JPS5986153A (ja) * 1982-05-24 1984-05-18 フュージョン・システムズ・コーポレーション マイクロ波無電極光源装置
JPS61104560A (ja) * 1984-10-25 1986-05-22 Toshiba Corp マイクロ波放電光源装置
JP2004518246A (ja) * 2000-11-22 2004-06-17 フュージョン・ユーヴィー・システムズ・インコーポレイテッド 紫外ランプ用電源及びサイクリングを使用して高電力／低冷却で動作させる方法

Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56115846U (ja) * 1980-02-06 1981-09-05
JPS56141165A (en) * 1980-04-04 1981-11-04 Mitsubishi Electric Corp Nonelectrode electric discharge lamp
JPH0250583B2 (ja) * 1980-04-04 1990-11-02 Mitsubishi Electric Corp
JPH0231459B2 (ja) * 1981-04-17 1990-07-13 Mitsubishi Electric Corp
JPH0231458B2 (ja) * 1981-04-17 1990-07-13 Mitsubishi Electric Corp
JPS57172650A (en) * 1981-04-17 1982-10-23 Mitsubishi Electric Corp Non-electrode electric-discharge lamp
JPS57172649A (en) * 1981-04-17 1982-10-23 Mitsubishi Electric Corp Non-electrode electric-discharge lamp
JPS57170267U (ja) * 1981-04-22 1982-10-26
JPS58196023A (ja) * 1982-03-29 1983-11-15 フユ−ジヨン・システムズ・コ−ポレ−シヨン 深紫外線フオトリトグラフイ−を達成する方法及び装置
JPS5986153A (ja) * 1982-05-24 1984-05-18 フュージョン・システムズ・コーポレーション マイクロ波無電極光源装置
JPH0414480B2 (ja) * 1982-05-24 1992-03-12 Fusion Systems Corp
JPS61104560A (ja) * 1984-10-25 1986-05-22 Toshiba Corp マイクロ波放電光源装置
JP2004518246A (ja) * 2000-11-22 2004-06-17 フュージョン・ユーヴィー・システムズ・インコーポレイテッド 紫外ランプ用電源及びサイクリングを使用して高電力／低冷却で動作させる方法

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