JPS5487291A - Semiconductor gas sensor - Google Patents

Semiconductor gas sensor

Info

Publication number
JPS5487291A
JPS5487291A JP15471677A JP15471677A JPS5487291A JP S5487291 A JPS5487291 A JP S5487291A JP 15471677 A JP15471677 A JP 15471677A JP 15471677 A JP15471677 A JP 15471677A JP S5487291 A JPS5487291 A JP S5487291A
Authority
JP
Japan
Prior art keywords
thin film
gas sensor
oxide semiconductor
diffusion layer
junction diode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15471677A
Other languages
Japanese (ja)
Inventor
Koichi Oguchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Suwa Seikosha KK
Original Assignee
Seiko Epson Corp
Suwa Seikosha KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp, Suwa Seikosha KK filed Critical Seiko Epson Corp
Priority to JP15471677A priority Critical patent/JPS5487291A/en
Publication of JPS5487291A publication Critical patent/JPS5487291A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To reduce the cost and improve the reliability of a gas sensor by using the fact that a thin film of an oxide semiconductor absorbs gases to shift the reverse break-down voltage of a PN junction diode.
CONSTITUTION: A P type Si substrate 5 is formed with a PN junction diode, which is composed of p+ diffusion layer 6 and N+ diffusion layer 7, and further with a thin film 9 of an oxide semiconductor such as SnO2 through a thin film 8 of an electrolyte such as SiO. The layers 6 and 7 are equipped with metal electrodes 10, and leads are extracted through wires 11. The thin film 9 is charged to a positive polarity by the gas absorption, and a depletion layer is narrowed in the vicinity of the surface so that the reverse break-down voltage is decreased. When the voltage is lower than a supply level, a current flows to ring a buzzer.
COPYRIGHT: (C)1979,JPO&Japio
JP15471677A 1977-12-22 1977-12-22 Semiconductor gas sensor Pending JPS5487291A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15471677A JPS5487291A (en) 1977-12-22 1977-12-22 Semiconductor gas sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15471677A JPS5487291A (en) 1977-12-22 1977-12-22 Semiconductor gas sensor

Publications (1)

Publication Number Publication Date
JPS5487291A true JPS5487291A (en) 1979-07-11

Family

ID=15590394

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15471677A Pending JPS5487291A (en) 1977-12-22 1977-12-22 Semiconductor gas sensor

Country Status (1)

Country Link
JP (1) JPS5487291A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58194468A (en) * 1982-05-07 1983-11-12 Hitachi Ltd Checking method of picture quality
US6627964B2 (en) 2000-08-10 2003-09-30 Ngk Spark Plug Co., Ltd. Gas sensor
EP1429404A2 (en) * 2002-12-09 2004-06-16 Shinko Electric Industries Co., Ltd. Fuel cell based on p-type and n-type semiconductors

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58194468A (en) * 1982-05-07 1983-11-12 Hitachi Ltd Checking method of picture quality
US6627964B2 (en) 2000-08-10 2003-09-30 Ngk Spark Plug Co., Ltd. Gas sensor
EP1429404A2 (en) * 2002-12-09 2004-06-16 Shinko Electric Industries Co., Ltd. Fuel cell based on p-type and n-type semiconductors
EP1429404A3 (en) * 2002-12-16 2005-06-01 Shinko Electric Industries Co., Ltd. Fuel cell based on p-type and n-type semiconductors
US7169501B2 (en) 2002-12-16 2007-01-30 Shinko Electric Industries Co., Ltd. Fuel cell

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