JPS5487291A - Semiconductor gas sensor - Google Patents
Semiconductor gas sensorInfo
- Publication number
- JPS5487291A JPS5487291A JP15471677A JP15471677A JPS5487291A JP S5487291 A JPS5487291 A JP S5487291A JP 15471677 A JP15471677 A JP 15471677A JP 15471677 A JP15471677 A JP 15471677A JP S5487291 A JPS5487291 A JP S5487291A
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- gas sensor
- oxide semiconductor
- diffusion layer
- junction diode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To reduce the cost and improve the reliability of a gas sensor by using the fact that a thin film of an oxide semiconductor absorbs gases to shift the reverse break-down voltage of a PN junction diode.
CONSTITUTION: A P type Si substrate 5 is formed with a PN junction diode, which is composed of p+ diffusion layer 6 and N+ diffusion layer 7, and further with a thin film 9 of an oxide semiconductor such as SnO2 through a thin film 8 of an electrolyte such as SiO. The layers 6 and 7 are equipped with metal electrodes 10, and leads are extracted through wires 11. The thin film 9 is charged to a positive polarity by the gas absorption, and a depletion layer is narrowed in the vicinity of the surface so that the reverse break-down voltage is decreased. When the voltage is lower than a supply level, a current flows to ring a buzzer.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15471677A JPS5487291A (en) | 1977-12-22 | 1977-12-22 | Semiconductor gas sensor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15471677A JPS5487291A (en) | 1977-12-22 | 1977-12-22 | Semiconductor gas sensor |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5487291A true JPS5487291A (en) | 1979-07-11 |
Family
ID=15590394
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15471677A Pending JPS5487291A (en) | 1977-12-22 | 1977-12-22 | Semiconductor gas sensor |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5487291A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58194468A (en) * | 1982-05-07 | 1983-11-12 | Hitachi Ltd | Checking method of picture quality |
US6627964B2 (en) | 2000-08-10 | 2003-09-30 | Ngk Spark Plug Co., Ltd. | Gas sensor |
EP1429404A2 (en) * | 2002-12-09 | 2004-06-16 | Shinko Electric Industries Co., Ltd. | Fuel cell based on p-type and n-type semiconductors |
-
1977
- 1977-12-22 JP JP15471677A patent/JPS5487291A/en active Pending
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58194468A (en) * | 1982-05-07 | 1983-11-12 | Hitachi Ltd | Checking method of picture quality |
US6627964B2 (en) | 2000-08-10 | 2003-09-30 | Ngk Spark Plug Co., Ltd. | Gas sensor |
EP1429404A2 (en) * | 2002-12-09 | 2004-06-16 | Shinko Electric Industries Co., Ltd. | Fuel cell based on p-type and n-type semiconductors |
EP1429404A3 (en) * | 2002-12-16 | 2005-06-01 | Shinko Electric Industries Co., Ltd. | Fuel cell based on p-type and n-type semiconductors |
US7169501B2 (en) | 2002-12-16 | 2007-01-30 | Shinko Electric Industries Co., Ltd. | Fuel cell |
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