JPS5487238A - Automatic optical scanning method - Google Patents
Automatic optical scanning methodInfo
- Publication number
- JPS5487238A JPS5487238A JP15433677A JP15433677A JPS5487238A JP S5487238 A JPS5487238 A JP S5487238A JP 15433677 A JP15433677 A JP 15433677A JP 15433677 A JP15433677 A JP 15433677A JP S5487238 A JPS5487238 A JP S5487238A
- Authority
- JP
- Japan
- Prior art keywords
- scanning
- motor
- size
- sample
- effected
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
- Mechanical Optical Scanning Systems (AREA)
Abstract
PURPOSE: To easily alter the scanning range thereby to effect the scanning operation at a high speed according to the shape and size of a sample by detecting the scanning light with the use of an optical detector, which has its spacing adjusted in accordance with the size of the smaple, thereby to control the scanning direction and the fine movement of the sample.
CONSTITUTION: When detectors 9 and 10, the spacing of which is adjusted to that according to the size and shape of a smaple 4, detect the scanning laser beam by a rotary mirror 2 through a motor 11, the motor 11 is stopped by a control circuit 12, and a motor 13 is turned to finly move a sample carriage at a right angle with respect to the scanning angle. Then, the stop of the motor 13 and the reverse drive of the motor 11 are effected through the circuit 12. The spare scanning operations of unnecessary parts is not effected by the repeated reciprocal scanning operations with in the restricted scanning range. Thus, the scanning operations at a high speed can be effected properly if the scanning range is altered easily in accordance with the shape and size of the sample.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15433677A JPS5487238A (en) | 1977-12-23 | 1977-12-23 | Automatic optical scanning method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15433677A JPS5487238A (en) | 1977-12-23 | 1977-12-23 | Automatic optical scanning method |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5487238A true JPS5487238A (en) | 1979-07-11 |
Family
ID=15581915
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15433677A Pending JPS5487238A (en) | 1977-12-23 | 1977-12-23 | Automatic optical scanning method |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5487238A (en) |
-
1977
- 1977-12-23 JP JP15433677A patent/JPS5487238A/en active Pending
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