JPS5486287A - Integrated-circuit device - Google Patents
Integrated-circuit deviceInfo
- Publication number
- JPS5486287A JPS5486287A JP15482277A JP15482277A JPS5486287A JP S5486287 A JPS5486287 A JP S5486287A JP 15482277 A JP15482277 A JP 15482277A JP 15482277 A JP15482277 A JP 15482277A JP S5486287 A JPS5486287 A JP S5486287A
- Authority
- JP
- Japan
- Prior art keywords
- film
- layer
- wiring
- films
- pattern
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 4
- 229910052681 coesite Inorganic materials 0.000 abstract 2
- 229910052906 cristobalite Inorganic materials 0.000 abstract 2
- 239000000377 silicon dioxide Substances 0.000 abstract 2
- 229910052682 stishovite Inorganic materials 0.000 abstract 2
- 229910052905 tridymite Inorganic materials 0.000 abstract 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 abstract 1
- 229910052593 corundum Inorganic materials 0.000 abstract 1
- 230000008878 coupling Effects 0.000 abstract 1
- 238000010168 coupling process Methods 0.000 abstract 1
- 238000005859 coupling reaction Methods 0.000 abstract 1
- 230000003647 oxidation Effects 0.000 abstract 1
- 238000007254 oxidation reaction Methods 0.000 abstract 1
- 229920002120 photoresistant polymer Polymers 0.000 abstract 1
- 239000000126 substance Substances 0.000 abstract 1
- 239000000758 substrate Substances 0.000 abstract 1
- 229910001845 yogo sapphire Inorganic materials 0.000 abstract 1
Landscapes
- Electrodes Of Semiconductors (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15482277A JPS5486287A (en) | 1977-12-21 | 1977-12-21 | Integrated-circuit device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15482277A JPS5486287A (en) | 1977-12-21 | 1977-12-21 | Integrated-circuit device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5486287A true JPS5486287A (en) | 1979-07-09 |
| JPS6138611B2 JPS6138611B2 (enrdf_load_stackoverflow) | 1986-08-30 |
Family
ID=15592623
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15482277A Granted JPS5486287A (en) | 1977-12-21 | 1977-12-21 | Integrated-circuit device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5486287A (enrdf_load_stackoverflow) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63133708U (enrdf_load_stackoverflow) * | 1987-02-24 | 1988-09-01 |
-
1977
- 1977-12-21 JP JP15482277A patent/JPS5486287A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6138611B2 (enrdf_load_stackoverflow) | 1986-08-30 |
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