JPS5480195A - Semiconductor humidity sensor - Google Patents
Semiconductor humidity sensorInfo
- Publication number
- JPS5480195A JPS5480195A JP14749377A JP14749377A JPS5480195A JP S5480195 A JPS5480195 A JP S5480195A JP 14749377 A JP14749377 A JP 14749377A JP 14749377 A JP14749377 A JP 14749377A JP S5480195 A JPS5480195 A JP S5480195A
- Authority
- JP
- Japan
- Prior art keywords
- gate
- humidity sensor
- oxide film
- threshold value
- silicon substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
Abstract
PURPOSE: To obtain a small-sized, high-reliability sensor at low cost, by using dielectric film having high dielectric constant between the gate and substrate of a humidity sensor using MOS transistor.
CONSTITUTION: Various oxides having dielectric constant of at least 10 times are provided berween silicon substrate 1 and gate to compose the gate construction. For instance, titanium oxide and magnesium oxide of 18 to 25 and titanium oxide film of 70 to 85 are used as the gate oxide film 4. Therefore, in the presence of moisture, when moisture enters a palladium electrode 5, a polarization layer is formed on the gate oxide film boundary surface, and the work function between the iron trioxide and silicon substrate varies, which causes the threshold value to be deviated. Thus, the change in the threshold value may be detected. In this way, a humidity sensor having extremely excellent humidity detecting sensitivity and response may be obtained.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14749377A JPS5480195A (en) | 1977-12-08 | 1977-12-08 | Semiconductor humidity sensor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14749377A JPS5480195A (en) | 1977-12-08 | 1977-12-08 | Semiconductor humidity sensor |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5480195A true JPS5480195A (en) | 1979-06-26 |
Family
ID=15431626
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14749377A Pending JPS5480195A (en) | 1977-12-08 | 1977-12-08 | Semiconductor humidity sensor |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5480195A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2017227561A (en) * | 2016-06-23 | 2017-12-28 | 富士通株式会社 | Gas sensor and usage of the gas sensor |
-
1977
- 1977-12-08 JP JP14749377A patent/JPS5480195A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2017227561A (en) * | 2016-06-23 | 2017-12-28 | 富士通株式会社 | Gas sensor and usage of the gas sensor |
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