JPS5472683A - Electron beam device and method of using same - Google Patents

Electron beam device and method of using same

Info

Publication number
JPS5472683A
JPS5472683A JP13384578A JP13384578A JPS5472683A JP S5472683 A JPS5472683 A JP S5472683A JP 13384578 A JP13384578 A JP 13384578A JP 13384578 A JP13384578 A JP 13384578A JP S5472683 A JPS5472683 A JP S5472683A
Authority
JP
Japan
Prior art keywords
same
electron beam
beam device
electron
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13384578A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5728946B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
Kei Biyuuroo Furetsudo
Jiei Zashio Jiyon
Eichi Kutsuku Roorensu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Publication of JPS5472683A publication Critical patent/JPS5472683A/ja
Publication of JPS5728946B2 publication Critical patent/JPS5728946B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/304—Controlling tubes by information coming from the objects or from the beam, e.g. correction signals

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Beam Exposure (AREA)
JP13384578A 1977-11-01 1978-11-01 Electron beam device and method of using same Granted JPS5472683A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US05/847,485 US4147937A (en) 1977-11-01 1977-11-01 Electron beam exposure system method and apparatus

Publications (2)

Publication Number Publication Date
JPS5472683A true JPS5472683A (en) 1979-06-11
JPS5728946B2 JPS5728946B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1982-06-19

Family

ID=25300745

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13384578A Granted JPS5472683A (en) 1977-11-01 1978-11-01 Electron beam device and method of using same

Country Status (6)

Country Link
US (1) US4147937A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JP (1) JPS5472683A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
CA (1) CA1094668A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
DE (1) DE2847369A1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
FR (1) FR2407567A1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
NL (1) NL183682C (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1980002772A1 (fr) * 1979-06-08 1980-12-11 Fujitsu Ltd Systeme de projection d'un rayon electronique
JPS55165632A (en) * 1979-06-12 1980-12-24 Fujitsu Ltd Method for electron-beam exposure
JPS5793528A (en) * 1980-11-28 1982-06-10 Ibm Electron beam device
JPS6175520A (ja) * 1984-09-21 1986-04-17 Toshiba Corp パタ−ン形成方法

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5493364A (en) * 1977-12-30 1979-07-24 Fujitsu Ltd Exposure system for electron beam
US4280186A (en) * 1978-07-07 1981-07-21 Tokyo Shibaura Denki Kabushiki Kaisha Exposure apparatus using electron beams
US4484077A (en) * 1979-06-08 1984-11-20 Fujitsu Limited Exposure system and method using an electron beam
JPS5753938A (en) * 1980-09-17 1982-03-31 Toshiba Corp Electron beam exposure apparatus
JPS57204125A (en) * 1981-06-10 1982-12-14 Hitachi Ltd Electron-ray drawing device
US4477729A (en) * 1982-10-01 1984-10-16 International Business Machines Corporation Continuously writing electron beam stitched pattern exposure system
JPS59124719A (ja) * 1982-12-29 1984-07-18 Fujitsu Ltd 電子ビ−ム露光装置
US4698509A (en) * 1985-02-14 1987-10-06 Varian Associates, Inc. High speed pattern generator for electron beam lithography
US4837447A (en) * 1986-05-06 1989-06-06 Research Triangle Institute, Inc. Rasterization system for converting polygonal pattern data into a bit-map
JPS62277724A (ja) * 1986-05-27 1987-12-02 Fujitsu Ltd 電子ビ−ム露光装置
JP2880284B2 (ja) * 1990-11-30 1999-04-05 株式会社日立製作所 電子ビーム描画法および装置
US5159201A (en) * 1991-07-26 1992-10-27 International Business Machines Corporation Shape decompositon system and method
US5251140A (en) * 1991-07-26 1993-10-05 International Business Machines Corporation E-beam control data compaction system and method
US5294800A (en) * 1992-07-31 1994-03-15 International Business Machines Corporation E-beam control data compaction system and method
RU2164718C1 (ru) * 2000-07-04 2001-03-27 Общество с ограниченной ответственностью "Агентство маркетинга научных разработок" Установка для формирования наноструктур на поверхности полупроводниковых пластин ионными пучками
DE102004055149B4 (de) * 2004-11-16 2007-07-19 Leica Microsystems Lithography Gmbh Vorrichtung und Verfahren zum Abbilden eines Mehrfach-Partikelstrahls auf ein Substrat

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50145865A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1974-04-18 1975-11-22
JPS5148313A (ja) * 1974-10-23 1976-04-26 Hitachi Ltd Fudogatajikihetsudoroodeingukiko
JPS51147967A (en) * 1975-06-14 1976-12-18 Fujitsu Ltd Method of controlling spot exposure

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3866013A (en) * 1973-09-19 1975-02-11 Ibm Method and apparatus for controlling movable means such as an electron beam
JPS5283177A (en) * 1975-12-31 1977-07-11 Fujitsu Ltd Electron beam exposure device

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50145865A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1974-04-18 1975-11-22
JPS5148313A (ja) * 1974-10-23 1976-04-26 Hitachi Ltd Fudogatajikihetsudoroodeingukiko
JPS51147967A (en) * 1975-06-14 1976-12-18 Fujitsu Ltd Method of controlling spot exposure

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1980002772A1 (fr) * 1979-06-08 1980-12-11 Fujitsu Ltd Systeme de projection d'un rayon electronique
JPS55165632A (en) * 1979-06-12 1980-12-24 Fujitsu Ltd Method for electron-beam exposure
JPS5793528A (en) * 1980-11-28 1982-06-10 Ibm Electron beam device
JPS6175520A (ja) * 1984-09-21 1986-04-17 Toshiba Corp パタ−ン形成方法

Also Published As

Publication number Publication date
DE2847369C2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1990-08-30
NL183682B (nl) 1988-07-18
FR2407567A1 (fr) 1979-05-25
NL7810809A (nl) 1979-05-03
JPS5728946B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1982-06-19
NL183682C (nl) 1988-12-16
CA1094668A (en) 1981-01-27
DE2847369A1 (de) 1979-05-03
US4147937A (en) 1979-04-03
FR2407567B1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1981-07-17

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