JPS5470895A - Thin film sensor - Google Patents
Thin film sensorInfo
- Publication number
- JPS5470895A JPS5470895A JP13818877A JP13818877A JPS5470895A JP S5470895 A JPS5470895 A JP S5470895A JP 13818877 A JP13818877 A JP 13818877A JP 13818877 A JP13818877 A JP 13818877A JP S5470895 A JPS5470895 A JP S5470895A
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- sensor
- evaporated
- contamination
- heater
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
Abstract
PURPOSE: To suitably eliminate the contamination of a sensor surface, while holding high reliability and productivity, so that the sensor may have a self-restoring function by laminating a heater thin film and a sensor thin film upon an identical substrate.
CONSTITUTION: A heater thin film 3 of Au constituting a heating layer is evaporated through a suitable mask upon a substrate 1 such as alumina porcelain. A thin film 2 of a sensor material such as a sputter thin film of TiO2 is further evaporated to cover the thin film 3. In order to eliminate the contamination of the surface of the thin film 2, a current flows from the power supply portion of the thin film 3 so that the adhered contaminants upon the surface can be evaporated or sintered off by the Joule heat generated.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13818877A JPS5470895A (en) | 1977-11-16 | 1977-11-16 | Thin film sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13818877A JPS5470895A (en) | 1977-11-16 | 1977-11-16 | Thin film sensor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5470895A true JPS5470895A (en) | 1979-06-07 |
Family
ID=15216116
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13818877A Pending JPS5470895A (en) | 1977-11-16 | 1977-11-16 | Thin film sensor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5470895A (en) |
-
1977
- 1977-11-16 JP JP13818877A patent/JPS5470895A/en active Pending
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