JPS546769A - Manufacture of compound semiconductor - Google Patents
Manufacture of compound semiconductorInfo
- Publication number
- JPS546769A JPS546769A JP7244777A JP7244777A JPS546769A JP S546769 A JPS546769 A JP S546769A JP 7244777 A JP7244777 A JP 7244777A JP 7244777 A JP7244777 A JP 7244777A JP S546769 A JPS546769 A JP S546769A
- Authority
- JP
- Japan
- Prior art keywords
- compound semiconductor
- manufacture
- boat
- fusing
- shielding
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Abstract
PURPOSE: To produce a compound semiconductor crystal which features a deep level and extremely reduced defect with a high quality, by providing a shielding between the boat and the quartz tube and fusing the upper surface of the solution to be covered by a cover.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7244777A JPS546769A (en) | 1977-06-17 | 1977-06-17 | Manufacture of compound semiconductor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7244777A JPS546769A (en) | 1977-06-17 | 1977-06-17 | Manufacture of compound semiconductor |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS546769A true JPS546769A (en) | 1979-01-19 |
Family
ID=13489543
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7244777A Pending JPS546769A (en) | 1977-06-17 | 1977-06-17 | Manufacture of compound semiconductor |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS546769A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59122601A (en) * | 1982-12-29 | 1984-07-16 | 株式会社 富士電機総合研究所 | Track point apparatus of attraction force type magnetic float vehicle |
-
1977
- 1977-06-17 JP JP7244777A patent/JPS546769A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59122601A (en) * | 1982-12-29 | 1984-07-16 | 株式会社 富士電機総合研究所 | Track point apparatus of attraction force type magnetic float vehicle |
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