JPS5459870A - Ion source unit - Google Patents

Ion source unit

Info

Publication number
JPS5459870A
JPS5459870A JP12689977A JP12689977A JPS5459870A JP S5459870 A JPS5459870 A JP S5459870A JP 12689977 A JP12689977 A JP 12689977A JP 12689977 A JP12689977 A JP 12689977A JP S5459870 A JPS5459870 A JP S5459870A
Authority
JP
Japan
Prior art keywords
source unit
ion source
ion
unit
source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12689977A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6118302B2 (enrdf_load_stackoverflow
Inventor
Kazuho Sone
Hideo Ootsuka
Tetsuya Abe
Reiji Yamada
Kenjirou Obara
Kouji Matsuda
Tei Kawai
Susumu Yamada
Toyoichi Oonishi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Japan Atomic Energy Agency
Nissin High Voltage Co Ltd
Original Assignee
Japan Atomic Energy Research Institute
Nissin High Voltage Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Japan Atomic Energy Research Institute, Nissin High Voltage Co Ltd filed Critical Japan Atomic Energy Research Institute
Priority to JP12689977A priority Critical patent/JPS5459870A/ja
Publication of JPS5459870A publication Critical patent/JPS5459870A/ja
Publication of JPS6118302B2 publication Critical patent/JPS6118302B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
  • Welding Or Cutting Using Electron Beams (AREA)
JP12689977A 1977-10-21 1977-10-21 Ion source unit Granted JPS5459870A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12689977A JPS5459870A (en) 1977-10-21 1977-10-21 Ion source unit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12689977A JPS5459870A (en) 1977-10-21 1977-10-21 Ion source unit

Publications (2)

Publication Number Publication Date
JPS5459870A true JPS5459870A (en) 1979-05-14
JPS6118302B2 JPS6118302B2 (enrdf_load_stackoverflow) 1986-05-12

Family

ID=14946625

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12689977A Granted JPS5459870A (en) 1977-10-21 1977-10-21 Ion source unit

Country Status (1)

Country Link
JP (1) JPS5459870A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5974659U (ja) * 1982-11-10 1984-05-21 東京エレクトロン株式会社 イオン注入装置のイオン発生装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5974659U (ja) * 1982-11-10 1984-05-21 東京エレクトロン株式会社 イオン注入装置のイオン発生装置

Also Published As

Publication number Publication date
JPS6118302B2 (enrdf_load_stackoverflow) 1986-05-12

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