JPS5456354A - Pattern inspecting equipment - Google Patents

Pattern inspecting equipment

Info

Publication number
JPS5456354A
JPS5456354A JP12234777A JP12234777A JPS5456354A JP S5456354 A JPS5456354 A JP S5456354A JP 12234777 A JP12234777 A JP 12234777A JP 12234777 A JP12234777 A JP 12234777A JP S5456354 A JPS5456354 A JP S5456354A
Authority
JP
Japan
Prior art keywords
pattern
circuit
value
signal
threshold value
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12234777A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6235218B2 (enrdf_load_stackoverflow
Inventor
Hisatake Yokouchi
Yasuo Kato
Mamoru Nonaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP12234777A priority Critical patent/JPS5456354A/ja
Publication of JPS5456354A publication Critical patent/JPS5456354A/ja
Publication of JPS6235218B2 publication Critical patent/JPS6235218B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Manufacture Of Electron Tubes, Discharge Lamp Vessels, Lead-In Wires, And The Like (AREA)
  • Formation Of Various Coating Films On Cathode Ray Tubes And Lamps (AREA)
JP12234777A 1977-10-14 1977-10-14 Pattern inspecting equipment Granted JPS5456354A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12234777A JPS5456354A (en) 1977-10-14 1977-10-14 Pattern inspecting equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12234777A JPS5456354A (en) 1977-10-14 1977-10-14 Pattern inspecting equipment

Publications (2)

Publication Number Publication Date
JPS5456354A true JPS5456354A (en) 1979-05-07
JPS6235218B2 JPS6235218B2 (enrdf_load_stackoverflow) 1987-07-31

Family

ID=14833684

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12234777A Granted JPS5456354A (en) 1977-10-14 1977-10-14 Pattern inspecting equipment

Country Status (1)

Country Link
JP (1) JPS5456354A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61153921A (ja) * 1984-12-26 1986-07-12 Nec Kansai Ltd 陰極線管の映像光検出方法
US4925420A (en) * 1987-02-13 1990-05-15 Videocolor Method for the automatic measurement of convergence and for the determination of corrections to be made in trichromatic cathode tube deflectors and machine for the application of this method

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61153921A (ja) * 1984-12-26 1986-07-12 Nec Kansai Ltd 陰極線管の映像光検出方法
US4925420A (en) * 1987-02-13 1990-05-15 Videocolor Method for the automatic measurement of convergence and for the determination of corrections to be made in trichromatic cathode tube deflectors and machine for the application of this method

Also Published As

Publication number Publication date
JPS6235218B2 (enrdf_load_stackoverflow) 1987-07-31

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