JPS5453960A - Manufacture for semiconductor element - Google Patents

Manufacture for semiconductor element

Info

Publication number
JPS5453960A
JPS5453960A JP11993877A JP11993877A JPS5453960A JP S5453960 A JPS5453960 A JP S5453960A JP 11993877 A JP11993877 A JP 11993877A JP 11993877 A JP11993877 A JP 11993877A JP S5453960 A JPS5453960 A JP S5453960A
Authority
JP
Japan
Prior art keywords
diffusion
life time
dispersion
scr
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11993877A
Other languages
English (en)
Other versions
JPS5837984B2 (ja
Inventor
Tadanobu Hayashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP52119938A priority Critical patent/JPS5837984B2/ja
Publication of JPS5453960A publication Critical patent/JPS5453960A/ja
Publication of JPS5837984B2 publication Critical patent/JPS5837984B2/ja
Expired legal-status Critical Current

Links

JP52119938A 1977-10-07 1977-10-07 半導体素子の製造方法 Expired JPS5837984B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP52119938A JPS5837984B2 (ja) 1977-10-07 1977-10-07 半導体素子の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP52119938A JPS5837984B2 (ja) 1977-10-07 1977-10-07 半導体素子の製造方法

Publications (2)

Publication Number Publication Date
JPS5453960A true JPS5453960A (en) 1979-04-27
JPS5837984B2 JPS5837984B2 (ja) 1983-08-19

Family

ID=14773872

Family Applications (1)

Application Number Title Priority Date Filing Date
JP52119938A Expired JPS5837984B2 (ja) 1977-10-07 1977-10-07 半導体素子の製造方法

Country Status (1)

Country Link
JP (1) JPS5837984B2 (ja)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61126390A (ja) * 1984-11-22 1986-06-13 Shin Meiwa Ind Co Ltd オイルフリ−スクロ−ル形流体機械
JPH01155086A (ja) * 1987-12-14 1989-06-16 Mitsui Seiki Kogyo Co Ltd 水循環式スクロール圧縮機

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50140057A (ja) * 1974-04-25 1975-11-10
JPS5236978A (en) * 1975-09-19 1977-03-22 Hitachi Ltd Process for production of semiconductor devices

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50140057A (ja) * 1974-04-25 1975-11-10
JPS5236978A (en) * 1975-09-19 1977-03-22 Hitachi Ltd Process for production of semiconductor devices

Also Published As

Publication number Publication date
JPS5837984B2 (ja) 1983-08-19

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