JPS5448099A - Piezooelectric crystalline membrane of zinc oxide - Google Patents

Piezooelectric crystalline membrane of zinc oxide

Info

Publication number
JPS5448099A
JPS5448099A JP11418077A JP11418077A JPS5448099A JP S5448099 A JPS5448099 A JP S5448099A JP 11418077 A JP11418077 A JP 11418077A JP 11418077 A JP11418077 A JP 11418077A JP S5448099 A JPS5448099 A JP S5448099A
Authority
JP
Japan
Prior art keywords
piezooelectric
zinc oxide
crystalline membrane
crystalline
membrane
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11418077A
Other languages
Japanese (ja)
Other versions
JPS5831746B2 (en
Inventor
Toshio Ogawa
Tasuku Masuo
Kouji Nishiyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Priority to JP52114180A priority Critical patent/JPS5831746B2/en
Priority to DE19782839715 priority patent/DE2839715A1/en
Priority to US05/942,278 priority patent/US4219608A/en
Publication of JPS5448099A publication Critical patent/JPS5448099A/en
Publication of JPS5831746B2 publication Critical patent/JPS5831746B2/en
Expired legal-status Critical Current

Links

Landscapes

  • Compositions Of Oxide Ceramics (AREA)
  • Inorganic Compounds Of Heavy Metals (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Physical Vapour Deposition (AREA)
JP52114180A 1977-09-17 1977-09-22 Zinc oxide piezoelectric crystal film Expired JPS5831746B2 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP52114180A JPS5831746B2 (en) 1977-09-22 1977-09-22 Zinc oxide piezoelectric crystal film
DE19782839715 DE2839715A1 (en) 1977-09-17 1978-09-13 ZINC OXYDE PIEZOELECTRIC CRYSTALLINE FILMS AND THE PROCESS FOR THEIR PRODUCTION
US05/942,278 US4219608A (en) 1977-09-17 1978-09-14 Piezoelectric crystalline film of zinc oxide and method for making same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP52114180A JPS5831746B2 (en) 1977-09-22 1977-09-22 Zinc oxide piezoelectric crystal film

Publications (2)

Publication Number Publication Date
JPS5448099A true JPS5448099A (en) 1979-04-16
JPS5831746B2 JPS5831746B2 (en) 1983-07-08

Family

ID=14631184

Family Applications (1)

Application Number Title Priority Date Filing Date
JP52114180A Expired JPS5831746B2 (en) 1977-09-17 1977-09-22 Zinc oxide piezoelectric crystal film

Country Status (1)

Country Link
JP (1) JPS5831746B2 (en)

Also Published As

Publication number Publication date
JPS5831746B2 (en) 1983-07-08

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